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Dive into the research topics where Yun-Jung Jee is active.

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Featured researches published by Yun-Jung Jee.


Analytical Chemistry | 2009

Determination of the absolute thickness of ultrathin Al2O3 overlayers on Si (100) substrate.

Kyung Joong Kim; Jong Shik Jang; Joo-Hee Lee; Yun-Jung Jee; Chung-Sam Jun

The thickness of nanometer Al(2)O(3) films was studied by X-ray photoelectron spectroscopy (XPS) and transmission electron microscopy (TEM). The thickness was determined from mutual calibration of the XPS and TEM measurements. The thickness offset of Al(2)O(3) films was proved to be close to zero by in situ XPS analysis. The thicknesses of a series of Al(2)O(3)/Si (100) films with different Al(2)O(3) thicknesses could be determined by mutual calibration from the thicknesses measured by TEM and XPS. The electron attenuation length of the Al 2p electron was determined as 2.4334 nm in the Al(2)O(3) matrix.


Archive | 2005

Method of inspecting a leakage current characteristic of a dielectric layer and apparatus for performing the method

Tae-min Eom; Chung-sam Jun; Yu-Sin Yang; Yun-Jung Jee


Archive | 2005

Method of forming a three-dimensional image of a pattern to be inspected and apparatus for performing the same

Yun-Jung Jee; Chung-sam Jun; Yu-Sin Yang; Tae-kyoung Kim


Archive | 2004

Method and apparatus for inspecting a wafer surface

Tae-min Eom; Yu-Sin Yang; Chung-sam Jun; Yun-Jung Jee; Joung-soo Kim; Moon-kyung Kim; Sang-mun Chon; Sun-Yong Choi


Archive | 2004

Wafer holder and wafer conveyor system equipped with the same

Tae-kyoung Kim; Yun-Jung Jee; Kyoung-Su Shin; Chung-sam Jun


Archive | 2007

Method of inspecgin a leakage current characteristic of a dielectric layer

Tae-min Eom; Chung-sam Jun; Yu-Sin Yang; Yun-Jung Jee


Archive | 2007

Method of measuring critical dimension

Byung-Sug Lee; Misung Lee; Yu-Sin Yang; Yun-Jung Jee; Chung-sam Jun


Archive | 2007

Wafer holder and wafer conveyor equipped with the same

Tae-kyoung Kim; Yun-Jung Jee; Kyoung-Su Shin; Chung-sam Jun


Solid-state Electronics | 2013

Characterization of residual implant damage by generation time technique

Yun-Jung Jee; Chun-Yong Kim; Chung-sam Jun; Tae-Sung Kim; Anton Belyaev; Dmitriy Marinskiy


Archive | 2004

Method for monitoring a density profile of impurities

Yun-Jung Jee; Sun-Yong Choi; Chung-sam Jun; Kwan-Woo Ryu

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Jong Shik Jang

Korea Research Institute of Standards and Science

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