Yun-Woo Lee

Realization and performance evaluation of high speed autofocusing for direct laser lithography

The autofocusing is one of the important parts in the automated vision inspection or measurement using optical microscopes. Moreover, laser micromachining or laser lithography requires a high speed and precision autofocusing. In this paper, we propose and realize an autofocusing system using two cylindrical lenses, which is the enhanced version of the previous astigmatism method. It shows very good performances, especially very high speed and the largest range in comparison with the previous astigmatic methods. The performance of our autofocusing system was evaluated by tracing the linear stage whose position was monitored by a commercial laser interferometer. Then we applied the autofocusing to the direct laser lithographic system, and successfully fabricated circular symmetry patterns on a 300 mm diameter surface with the resolution of less than 1 microm within the defocusing range of +/-50 microm. The speed of the autofocusing was 150 Hz.

Merit function regression method for efficient alignment control of two-mirror optical systems

The precision alignment of high-performance, wide-field optical systems is generally a difficult and often laborious process. We report a new merit function regression method that has the potential to bring to such an optical alignment process higher efficiency and accuracy than the conventional sensitivity table method. The technique uses actively damped least square algorithm to minimize the Zernike coefficient-based merit function representing the difference between the designed and misaligned optical wave fronts. The application of this method for the alignment experiment of a Cassegrain type collimator of 900mm in diameter resulted in a reduction of the mean system rms wave-front error from 0.283 lambda to 0.194 lambda;, and in the field dependent wave-front error difference from +/-0.2 lambda to +/-0.014 lambda in just two alignment actions. These results demonstrate a much better performance than that of the conventional sensitivity table method simulated for the same steps of experimental alignment.

A storage ring experiment to detect a proton electric dipole moment

A new experiment is described to detect a permanent electric dipole moment of the proton with a sensitivity of 10-29 e ⋅ cm by using polarized magic momentum 0.7 GeV/c protons in an all-electric storage ring. Systematic errors relevant to the experiment are discussed and techniques to address them are presented. The measurement is sensitive to new physics beyond the standard model at the scale of 3000 TeV.

Laser output power stabilization for direct laser writing system by using an acousto-optic modulator

We present experimental results on the output power stabilization of an Ar(+) laser for a direct laser writing system (LWS). Instability of the laser output power in the LWS cause resolution fluctuations of being fabricated diffractive optical elements or computer-generated holograms. For the purpose of reducing the power fluctuations, we have constituted a feedback loop with an acousto-optic modulator, a photodetector, and a servo controller. In this system, we have achieved the stability of +/-0.20% for 12 min and the relative intensity noise level of 2.1 x 10(-7) Hz(-12) at 100 Hz. In addition, we applied our system to a 2 mW internal mirror He-Ne laser. As a consequence, we achieved the output power stability of +/-0.12% for 25 min.

Improvement of linewidth in laser beam lithographed computer generated hologram

We propose a new laser lithographic technique with enhanced resolution. A calcite wave plate is introduced in our system to separate an input lithographic beam into two orthogonally polarized beams. After going through an imaging lens, these two beams meet again on the focal point, and generate a small interferogram that sharpens the shape of the focused beam spot. Using this phenomenon, we can overcome the diffraction limit of the imaging lens and achieve a 486-nm-linewidth.

Double-pass point diffraction interferometer

We propose a new point diffraction interferometer for qualitative optical analysis. Point diffraction is made two times to generate interfering waves with a single pinholed polarizer. Diffraction from a pinholed polarizer makes reference and measurement waves with a double-pass configuration. A quarter-wave plate rotates their polarization angles after reciprocation. The interferogram between the diffracted–undiffracted measurement wave and the undiffracted–diffracted reference wave is vibration-insensitive due to a common-path configuration. We examined its capability by changing the pinhole size and divergence angle of the diffracted wave for test optics with various numerical apertures.

Absolute three-dimensional coordinate measurement by the two-point diffraction interferometry.

We describe a method of absolute xyz-coordinates measurement based on the two-point diffraction interferometer. In this paper we use a new optimization algorithm to the interferometer. Experimental results show that the systematic error of the interferometer is less than 1 mum (peak-to- valley value) within a 60 mm by 60 mm by 20 mm working volume. To extract the systematic error and verify the absolute performance of the interferometer we applied the Fourier self-calibration concept.

Athermal Elastomeric Lens Mount for Space Optics

We investigated the optimum adhesive thickness for athermalizing an elastomeric lens mount in our space optics application. Theoretical results were compared with finite element solutions using two different models; discrete circular pads and discrete circular pads with columns filling the insertion holes reflecting the reality. A noticeable difference between their optimal thicknesses was observed, and physical interpretation revealed the uncertainty of prevailing athermal equations. A pilot sample was made to check our results and thermo-optical stress was assessed using an interferometer after isothermal load. This study presented insight into preliminary design guidance in elastomeric lens mounting.

Azimuthal position error correction algorithm for absolute test of large optical surfaces.

Absolute test needs test part rotation to separate errors of the interferometer itself from errors due to the test surfaces. At this time, previous absolute test algorithms assume no azimuthal position error during part rotation. For large optics whose diameters are 0.6 m and over, however, exact rotations are physically difficult. Motivated by this, we propose a new algorithm that adopts least squares technique to determine the true azimuthal positions of part rotation and consequently eliminates testing errors caused by rotation inaccuracy.

Testing of steep convex aspheric surface with a Hartmann sensor by using a CGH

Most aspheric surfaces have been tested by interferometer with some null correctors. This approach, however, often fails when there are many aspherical terms or test surface is very steep because it is not easy to design the conventional null lens or CGH (Computer Generated Hologram). On the other hand, 3-D profilometer can measure aspheric surfaces without any null correctors; however, it takes some time to measure, which makes it unsuitable for the production line in the factory. In this paper, we apply the Hartmann test to the measurement of steep convex aspheric surfaces of which diameter is about 16 mm. In order to increase the measurement accuracy, we calibrated the test setup using a CGH that simulates the ideal test surface. We demonstrated that the significant amount of error in the test setup could be removed by this calibration process. The test results showed only 2 nm rms WFE (wave front error) difference even though the WFE of test setup was worsened by more than 0.13 mum rms. Since this method makes it possible to measure highly aspheric surface quickly and accurately, it can be used in the production line.