Yuqing Xiong

Model for Atomic Layer Deposition of Aluminum on Inner Wall of Rectangular Pipes with Large Length Aspect Ratio

Feasibility of aluminum thin film deposition on inner wall of rectangular pipes with length aspect ratio up to 50 by atomic layer deposition was studied, by solving kinetics equation of gas adsorption on inner wall of pipes. And the time for reactants to reach saturated adsorption in pipes was calculated. Furthermore, the process of aluminum deposition by atomic layer deposition was simulated by Kinetic Monte Carlo method, and a growth model for atomic layer deposition of aluminum on inner wall of long rectangular pipes was established.

Model for atomic layer deposition on inner wall of rectangular pipes with large aspect ratio

Feasibility of thin films deposited on inner wall of rectangular pipes with length aspect ratio up to 50 by atomic layer deposition was studied, by solving kinetics equation of gas adsorption on inner wall of pipes. And the time for reactants to reach saturated adsorption in pipes was calculated. Furthermore, the process of thin film deposition by atomic layer deposition was simulated by Kinetic Monte Carlo method, and a growth model for atomic layer deposition of aluminum on inner wall of long rectangular pipes was established.

Study of designing minus filters based on rugate theory

The influence of the rugate filter index profile function parameters, such as refractive index amplitude, film thickness and reference wavelength on the minus filter transmission spectrum, were investigated in this paper. The results show that the rejection bandwidth was affected by the refractive index amplitude, the depth of attenuation region was influenced by the film thickness, and the position of cut-off wavelength was determined by the reference wavelength. The method using the Rugate theory to design minus filters was presented, and several kinds of minus filters were designed using the method.