Yutaka Akiyama

Triangle and tetrahedron mesh generation method

Method for determining the intersections of Delaunay partitioned tetrahedra with the boundary of a body to be analyzed

Method and system for dividing analyzing region in device simulator.

Process simulator and process simulating method

Method for simulating diffusion of impurity materials in semiconductor devices

Device simulator for semiconductor device

Computer simulation method of silicon oxidation

Method of simulating oxidation enhanced diffusion by solving partial differential equation

Process simulation method for calculating a surface oxidant concentration in oxidation process

Method and apparatus for simulating an oxidation process in a semiconductor device manufacturing step