Yutaka Okamoto
Sony Broadcast & Professional Research Laboratories
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Publication
Featured researches published by Yutaka Okamoto.
The Japan Society of Applied Physics | 1996
Jun Suenaga; Hirofumi Sumi; Kazuhiro Tajima; Atsushi Horiuchi; Michihiro Kanno; Yutaka Okamoto
An advanced Ti salicide technology is proposed for high performance quater-micron logic LSIs. A new salici& pmcess nsned ESPAD @nhanced Silici.l,tion with Pre-Artorphization using Drect ion implantation) in combination with an optimum RTP (Rapid Thermal Promsing) and fumace annealing has been developed The fonired TiSi is able to maintain low sheet rcsistmce even in nanrow (0.2 4 m) S/D region to achieve minimuin basic cell size and low junction leakage cunent. High performance logic LSIs with low stand-by cunent are fabricated using this t€.hnology.
Archive | 1990
Shinichi Ito; Naoya Noshi; Yutaka Okamoto
Archive | 1994
Yutaka Okamoto
Archive | 1997
Hirofumi Sumi; Jun Suenaga; Kazuhiro Tajima; Yutaka Okamoto; Atsushi Horiuchi
Archive | 1995
Yutaka Okamoto
Archive | 1993
Yutaka Okamoto
Archive | 1998
Yutaka Okamoto
Archive | 2001
Minoru Ishida; Yutaka Okamoto
Archive | 1996
Yutaka Okamoto
Technical report of IEICE. ICD | 1999
Hirofumi Sumi; Jun Suenaga; Yutaka Okamoto
