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Yuwen Chen

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Publication

Featured researches published by Yuwen Chen.

Archive | 2012

Method for forming non-load-effect large size groove

Yushu Yang; Cheng Li; Yuwen Chen

Archive | 2012

Process for eliminating side wall width load effect

Yushu Yang; Cheng Li; Yuwen Chen

Archive | 2012

Etcher table for eliminating crystalline condensation defect

Yushu Yang; Cheng Li; Yuwen Chen

Archive | 2012

Novel gate graph dimension shrinkage method

Yushu Yang; Cheng Li; Yuwen Chen

Archive | 2012

Improved dry-process etching cavity

Cheng Li; Yushu Yang; Yuwen Chen; Ciyun Qiu

Archive | 2012

Method for solving problem of over-slow speed ratio of dry etching of porous low-k medium

Cheng Li; Yushu Yang; Yuwen Chen; Ciyun Qiu

Archive | 2012

Processing method of titanium nitride film subjected to fluorine group plasma etching

Cheng Li; Yushu Yang; Yuwen Chen; Ciyun Qiu

Archive | 2012

High-selectivity dry etching method for HfO2 thin film

Yushu Yang; Yuwen Chen; Ciyun Qiu

Archive | 2012

Method of forming connection holes

Yushu Yang; Cheng Li; Yuwen Chen

Archive | 2012

Treatment method of aluminum wire corrosion defects

Yushu Yang; Cheng Li; Yuwen Chen

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Collaboration

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