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Zhang Haibo

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Publication

Featured researches published by Zhang Haibo.

Archive | 2013

Deep ultra-violet lithography illuminating system

Lu Liang; Zhang Haibo; He Yi; Lin Wumei

Archive | 2014

Efficient polarization purifying device

Huang Jinping; Lin Wumei; Xing Tingwen; Fan Zhenjie; Zhang Haibo

Archive | 2014

Lighting model generating device for high-numerical-aperture projection lithography system

Xing Shasha; Lin Wumei; Xing Tingwen; Du Meng; Zhang Haibo

Archive | 2014

Polarization purification device

Fan Zhenjie; Xing Tingwen; Lin Wumei; Liao Zhijie; Zhang Haibo

Archive | 2013

Coherent factor adjusting system in deep ultraviolet lithography lighting system

Lu Liang; Zhang Haibo; Liao Zhijie; Lin Wumei; Xing Tingwen; Gan Dachun; He Yi

Archive | 2015

Coherent factor adjusting device in photoetching illuminating system

Lu Liang; Zhang Haibo; Lin Wumei

Archive | 2014

Laser alignment and beam expanding system

Fan Zhenjie; Xing Tingwen; Lin Wumei; Liao Zhijie; Zhang Haibo

Archive | 2014

Variable focal length optical system

He Yi; Zhang Haibo; Lin Wumei; Xing Tingwen; Liao Zhijie; Gan Dachun; Lu Liang

Archive | 2014

Optical system heat performance simulation method

Gan Dachun; Zhang Haibo; Xing Tingwen; Lin Wumei; He Yi; Lu Liang

Archive | 2013

Polarized light modulation component

Fan Zhenjie; Xing Tingwen; Lin Wumei; Zhang Haibo

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Collaboration

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Xing Tingwen

Chinese Academy of Sciences

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Wang Ruilin

Chinese Academy of Sciences

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Zhang Lixia

Chinese Academy of Sciences

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