Zili Zhang
Nanjing University of Technology
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Publication
Featured researches published by Zili Zhang.
Materials Science Forum | 2011
Zili Zhang; Chen Bo Yin; Chun Min Tao
In this paper we describe the fabrication steps and the implementation of a planar type gas sensing applications with suspended structure, which presents very low power consumption. Simulations with the finite element model tool show homogeneous temperature distribution across the sensitive film. The device attached with a spin-coated thin layer of SnO2 showed a reasonable sensing performance to hydrogen.
Advanced Materials Research | 2011
Chen Bo Yin; Zili Zhang; Chun Min Tao; Ning Ning Dong
A gas sensor with planar-type micro-hotplate (MHP) with Si-island was designed and fabricated in this paper. The sensor was fabricated simply by using only three masks for the lithography process. The temperature distribution across the sensitive film was simulated and analyzed using ANSYS. A uniform temperature distribution was obtained after added Si-island. The SnO2 sensitive film was deposited through sol-gel spin-coating method and showed reasonable gas-sensing properties to hydrogen at 300°C.
Materials Science in Semiconductor Processing | 2017
Liu Yang; Chenbo Yin; Zili Zhang; Junjing Zhou; Haihan Xu
Applied Surface Science | 2014
Liu Yang; Chenbo Yin; Zili Zhang
Ceramics International | 2017
Zili Zhang; Chenbo Yin; Liu Yang; Wenhua Jia; Junjing Zhou; Haihan Xu; Donghui Cao
Archive | 2012
Chunmin Tao; Chenbo Yin; Zili Zhang
Archive | 2012
Chenbo Yin; Zili Zhang; Chunmin Tao; Ningning Dong; Liu Yang
Archive | 2011
Chenbo Yin; Zili Zhang; Chunmin Tao; Ningning Dong
Archive | 2011
Chenbo Yin; Zili Zhang; Chunmin Tao; Ningning Dong
Procedia Engineering | 2011
Zili Zhang; Chenbo Yin; Chunmin Tao; Ningning Dong
