Zou Chunli
Tsinghua University
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Publication
Featured researches published by Zou Chunli.
Proceedings of International Conference on Planarization/CMP Technology 2014 | 2014
Zou Chunli; Pan Guoshun; Xu Li; Shi Xiaolei; Yuyu Liu
A method for preparing atomically smooth gallium nitride (GaN) surface with high material removal rate that involves chemical mechanical polishing with sulfate radical (SO4-) oxidizer and Fe2+ activator in slurry is presented. The results indicate that complexing agent with Fe2+ activator is the key point to obtain atomically smooth GaN surface and higher removal rate of GaN. Atomic force microscope (AFM) shows that the average surface roughness (Ra) is 0.0601nm.
Archive | 2015
Pan Guoshun; Xu Li; Zou Chunli; Shi Xiaolei; Zhou Yan; Luo Guihai; Gong Hua
Archive | 2014
Pan Guoshun; Gu Zhonghua; Zou Chunli; Gao Yuan
Archive | 2013
Pan Guoshun; Zhou Yan; Luo Guihai; Gu Zhonghua; Zou Chunli; Gong Hua
Archive | 2013
Pan Guoshun; Gu Zhonghua; Zou Chunli; Li Tuo; Luo Jianbin; Lu Xinchun; Liu Yan
Archive | 2014
Pan Guoshun; Gu Zhonghua; Gong Hua; Zou Chunli
Archive | 2015
Pan Guoshun; Zhou Yan; Luo Guihai; Zou Chunli; Gong Hua; Shi Xiaolei; Xu Li
Archive | 2014
Gong Hua; Gu Zhonghua; Zou Chunli; Pan Guoshun
Archive | 2015
Pan Guoshun; Zou Chunli; Gu Zhonghua; Xu Li; Gong Hua; Wang Xin
Archive | 2014
Pan Guoshun; Gu Zhonghua; Luo Guihai; Gong Hua; Zou Chunli; Chen Gaopan; Wang Xin
