A. D. Akhsakhalyan

A method for measuring the shape of a surface of an ellipsoid of rotation on a Talysurf CCI 2000 interference microscope

A method for measuring the shape of the surface of an ellipsoid of rotation on a Talysurf CCI 2000 white-light scanning interference microscope is presented. The measurement results are compared to alternative measurements. It is shown that the measurement results are quite consistent.

Current status and development prospects for multilayer X-ray optics at the Institute for Physics of Microstructures, Russian Academy of Sciences

A real opportunity for applying traditional optical methods to soft X-ray and extreme UV (ultraviolet) radiation bands has appeared thanks to recent successes in the area of multilayer-mirror deposition and procedures for fabricating supersmooth and highly precise substrates of mirrors. The implementation of this opportunity opens up fundamentally new prospectss in the nanodiagnostics of substances, micro- and nanoelectronics, microbiology, solar astronomy and other applications. The main directions in multilayer X-ray optics developed at the Institute for the Physics of Microstructures, Russian Academy of Sciences, are presented and the aspects of the use thereof in science and technology are considered. The main problems arising during the fabrication of multilayer interference structures for the soft X-ray and extreme UV bands are discussed. The main results obtained recently in the scope of each direction of investigation are presented. Plans for the future development of these directions are discussed.

Applying reactive ionic-beam etching to correcting the shape of X-ray mirrors

A procedure for correcting the shape of cylindrical surfaces by means of reactive ionic-beam etching is presented. The results from an experiment on manufacturing a glass surface as an elliptical cylinder are shown.

A method for manufacturing multilayer mirrors in the form of the sector of revolution figure for hard X-rays

A two-stage method for manufacturing multilayer mirrors in the form of the sector of revolution figure is presented. The method is to fabricate a mirror in the form of concave paraboloid of revolution for wavelength λ = 0.154 nm. The collimating mirror’s properties are analyzed using a microfocus X-ray source.

Possibility for the form correction of X-ray mirrors by reactive ion-beam etching

Key parameters for the reactive ion-beam etching of glass, quartz and silicon are studied. The dependence of the etching rate on chamber pressure and etching time is investigated. The etching zone has the form of a long (∼50 mm), narrow (∼1 mm) strip with depth homogeneity at a level of 0.2%. Such a zone is a handy tool for correcting the shape of cylindrical surfaces.

A multilayer x-ray mirror in the form of an ellipsoid of revolution

Laboratory technology for the preparation of multilayer mirrors in the form of an ellipsoid of revolution for the hard x-ray wavelength range (λ = 0.1 nm) has been developed on the basis of the replica method. A prototype mirror in the form of a sector of an ellipsoid of revolution is prepared. Its shape and reflection characteristics are studied.

Measurement of the profile and curvature of cylindrical multilayer mirrors irradiated by a divergent X-ray beam

Two techniques for determining the local period and curvature of the surfaces of cylindrical multilayer mirrors are discussed. These techniques make it possible to measure the mentioned parameters of mirrors in a divergent X-ray beam with the wavelength λ = 0.154 nm and differ in the boundary conditions selected.

X-ray intensity distribution in the image plane of elliptic multilayer mirrors

The x-ray intensity distribution in the image plane of a multilayer elliptical cylinder and ellipsoid-revolution mirrors was studied Analytical expressions for calculating this distribution were derived as a function of the size of the source, its position with respect to the mirror, and the microroughness of the multilayer structure.

Prospects of low-coherence tandem interferometry for measurements of aspherical surface profiles

The possibility of constructing a profilometer based on a low-coherence tandem interferometer is demonstrated experimentally. A new technique enabling errors caused by oscillations of the scanner to be excluded is proposed.

Comparative characteristics of optical methods for measuring the surface shape at the institute for physics of microstructures, Russian Academy of Sciences

Several optical methods for measuring the shape of a mirror surface are presented. Their advantages, disadvantages, and fields of applications are indicated. The results of measurements conducted for the same spherical mirror with the use of these methods are given. Good agreement between the results is obtained.