A. Irzhak

Melt-spun thin ribbons of shape memory TiNiCu alloy for micromechanical applications

The development of micromechanical devices (MEMS and NEMS) on the basis of nanostructured shape memory alloys is reported. A Ti50Ni25Cu25 (at. %) alloy fabricated by the melt spinning technique in the form of a ribbon with a thickness around 40 μm and a width about 1.5 mm was chosen as a starting material. Technological parameters were optimized to produce the alloy in an amorphous state. The thickness of the ribbon was reduced to 5–14 μm by means of electrochemical polishing. A nanostructural state of the thin ribbons was obtained via the dynamic crystallization of the amorphous alloy by application of a single electric pulse with duration in the range of 300–900 μs. A microtweezers prototype with a composite cantilever of 0.8 μm thick and 8 μm long was developed and produced on the basis of the obtained nanostructured thin ribbons by means of the focused ion beam technique. Controlled deformation of the micromanipulator was achieved by heating using semiconductor laser radiation in a vacuum chamber of scanning ion-probe microscope.

Shape Memory Effect in Microsized Samples of Rapidly Quenched Ferromagnetic Alloy Ni-Mn-Ga

The melt spun ribbons of ferromagnetic shape-memory alloy (FSMA) Ni53Mn24Ga23 have been prepared by rapid quenching. Thermomechanical properties have been studied by multi-point technique and perfect shape memory effect (SME) observed. The magnetic field effect on thermomechanical behavior was studied by placing multi-point press into Bitter magnet. A giant (1.2%) bending strain, due to magnetic field-induced martensitic transformation (magnetic-field-induced SME), has been observed at a constant temperature T= 56 °C in a field of 6 T. At least 80% of martensitic transformation reversibly induced by the external field was observed experimentally. Submicron sized samples of the alloy with thicknesses down to 300 nm have been milled by focused ion beam (FIB) technique. The deformation behavior of these samples was studied by Omniprobe micromanipulator in the vacuum chamber of FIB device. The SME response was tested in situ by heating the samples with a semiconductor laser. Strong two-way SME was observed due to bending strains of the samples under study.

Practical system for nanomanipulation

the paper reported about new practical system for 3D three dimensional (3D) nano-manipulation. The system consists of advanced high precision nano-manipulators based on piezoelectric resonance motors and end-effectors. The end-effector is the bimetallic composite nanotweezers based on Ti2NiCu alloy with shape memory effect. This nano-tweezer is easy in use micron-size nano-tool controlled by semiconductor laser radiation or electric current in vacuum chamber or other (i.e. liquid) environment in different types of microscopes. The new system for the first time gives the real possibility for 3D high accurate, cheap and easy in use, controllable, reproducible, quick manipulation and fabrication of large-scale nanostructures. The system can manipulate real nano-objects, such as nanotubes, bio-nanoparticles etc. The motion range - 15 mm, minimal step - 0, 4-10 nm, thermal drift <;5 nm/h at 20°C; speed of linear motion: 20 nm/s - 20 mm/s, nano-tweezers dimensions: 20*2.3*1.6 μm3, the size of the objects to be manipulated: 30 - 1000 nm.

Ion beam nanofabrication for mass production of nanotweezers based on new composite functional material with shape memory

Miniaturization is the central theme in modern fabrication technology. Many of the components used in modern products are becoming smaller and smaller. The applicability of the standard lithographic technologies to processing the new functional materials is crucial for their successful wide implementation in practice. Recently we have reported experimental design and test of the new generation for nano-mecanical devices like nano-tweezers based on original bilayer Ti2NiCu/Pt composite structures. In the present paper it is demonstrated that standard ion beam nano-fabrication technology is quit suitable for full cycle of production operational stages of practical nano-tweezers production. The technological experiments were done on realizing by usage of a novel focused ion beam instrument Raith ionLiNE™ device. This device is a novel focused ion beam instrument for low dose nanolithography and nano-fabrication. ionLiNE™ Raith was applied for experimental composite nano-tweezers production on the base of Ti2NiCu/W with length - 30 μm, gap width 0.9 μ. The tests showed high quality of reproduction and long term operation under thermal control at temperature change only 14 K.

Advanced System for Nanofabrication and Nanomanipulation Based on Shape Memory Alloy

Miniaturization is the central theme in modern fabrication technology. Many of the components used in modern products are becoming smaller and smaller. Here it is reported about the frontier nano-assembling and nano-investigations using new practical 3-D nanomanipulation system based on advanced high precision piezoelectric resonance motors, and the bimetallic composite nanotweezers based on Ti2NiCu alloy with shape memory effect. The system for the first time gives the real possibility for high-speed three-dimensional controllable reproducible, manipulation and fabrication of large-scale nanostructures in SEM, TEM, SEM, FIM microscopes under vacuum, air and liquid conditions. The system can manipulate real nano-objects, i.e., nanotubes and bio-nanoparticles. The size of the objects to be manipulated: 30–1000 nm; the motion range—15 mm, the minimal step—0.4 to 10 nm, the thermal drift <5 nm/h at 20 °C; the speed of linear motion: 20–20 mm/s. The experimental design and test of the new generation nanotools based on original bilayer Ti2NiCu/Pt composite structures is described. The production technology is based on standard ion beam nanofabrication technology for full cycle of operational stages of practical nanotweezers production with record small dimensions: (3–20) × (2–3) × 1.6 μm3. The technological experiments were done by usage of a novel focused ion beam instrument Raith ionLiNETM. ionLiNETM Raith was applied for experimental composite nanotweezers production on the base of Ti2NiCu/W with length—30 μm, gap width 0.9 μm. The tests showed high quality of reproduction and long-term operation of nanotweezers under thermal control at temperature change only 14 K.

Thermally controlled nanoobjects manipulation system based on composite Ti 2 NiCU/Pt nanotweezers

We report the new system for manipulation of nanoobjects based on composite Ti2NiCu/Pt nanotweezers with shape memory effect. The design consists of the bimetallic Ti2NiCu/Pt shape memory nanotweezers placed on the tip of electrochemically etched tungsten needle. The semiconductor diode placed on the tip of the needle plays both role of resistive element of the heater and temperature sensor for feedback control loop closing. The device is compatible with existing positioning systems like OmniProbe®, Kleindiek®, etc. and may find numerous practical applications in various tasks of nanotechnology connected with 3D manipulation.

Nano-nanomanipulation of CdSe nanowires using nano-tweezers based on shape memory alloys

Recently, new technology in 3D-nanomanipulation has been proposed based on the properties of Ni based functional alloys that exhibit thermoelastic martensitic transition and shape memory effects (SME) at micro and sub-micrometer dimensions. This report gives a survey of the current state of nano-manipulation and concludes that this new system can be applied to numerous problems, which require the manipulation and processing of nano and micro objects of different materials and structures. The report describes the application of the new technology of 3D-manipulation to the experimental study of individual CdSe nanowires, which are currently utilized in photovoltaic solar and hydrogen production renewable energy based applications.

Structure and morphology of the Znx Mg1−xO nanowires studied using shape memory composite nano-tweezers

Nanowires (NWs), nano rods, nano whiskers are an important class of materials with the great potential for applied and fundamental basic research. The cross section of NWs is typically cylindrical, hexagonal, square, or triangular and is uniform with a high aspect ratio. Recently the new technology of 3D-nanomanipulation is proposed based on composite bimetallic structures with shape memory effect (SME). The present paper reports application of the new nano-tweezers system for experimental investigation of the individual nanowires of ZnxMg1-xO, which is the example of submicron-sized objects whose individual properties are difficult to study by standard methods. We describe the technology of preparation of ZnxMg1-xO NWs, the process of the selection of individual NWs by composite nano-tweezers with SME in vacuum chamber of FIB device and experimental study of their structure and morphology by TEM.

Manipulations of Submicro-fibers of Culex Pipiens with the Help of Nano-tweezers with Shape Memory Effect into Vacuum Chamber of FIB

In recent years, a record small mechanical tools based on composites with shape memory effect (SME) were created [1-4]. Application of the technology of selective ion etching allowed for the creation of two-layer composite actuators and tools based on rapidly quenched nonmagnetic alloys with SME, such as Ti2NiCu [1]. These composite actuators can change their shape reversely and produce mechanical work using only “one-way” SME of the alloy [2]. Currently in the field of manipulation and manufacturing at the nanoscale, there is an urgent need to develop new functional materials in order to fill the gap between the dimensions of modern MEMS and real size of nano-objects to be manipulated. Recently the operation of nano-tweezers using layered composites based on alloy with SME driven by thermal actuation has been demonstrated [1-3]. The operation of the Ti2NiCu/Pt composite actuator driven by heating was demonstrated, with an overall volume of the actuator of less than 1 μm3 and thickness of active layer of the T2NiCu alloy being down to 70 nm [1]. These achievements of nanotechnology can be used certainly in various branches of biology. Developed technique allow to hold, move and manipulate of animate or inanimate objects of submicron and nanometer sizes, for example, carbon nanotubes, graphene sheets, bacteria, viruses, biological particles of different nature. The purpose of this paper is description of experiments on preparation of insect’s fibers of submicron sizes into a vacuum chamber of FIB.