A K Powell

Broad angular multilayer analyzer for soft X-rays

Using numerical optimization algorithm, non-periodic Mo/Si, Mo/Be, and Ni/C broad angular multilayer analyzers have been designed. At the wavelength of 13 nm and the angular range of 45~49 degrees , the Mo/Si and Mo/Be multilayer can provide the plateau s-reflectivity of 65% and 45%, respectively. At 5.7 nm, the s-reflectivity of Ni/C multilayer is 16% in the 44~46 degrees range. The non-periodic Mo/Si broad angular multilayer was also fabricated using DC magnetron sputtering, and characterized using the soft X-ray polarimeter at BESSY. The s-reflectivity is higher than 45.6% over the angular range of 45~49 degrees at 13 nm, where, the degree of polarization is more than 99.98%.

The design of broadband multilayer optics using simulated annealing

A technique is presented for the broadband design optimization of multilayered reflective optic coatings. The optimization algorithm converges onto a stable configuration giving a high reflectivity for the wavelength range 10–12 nm and 13–16 nm. The silicon absorption edge at 12.4 nm limits the performance over the whole 10–16 nm range.