Aarne Oja
Centre for Metrology and Accreditation
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Publication
Featured researches published by Aarne Oja.
Design, test, integration, and packaging of MEMS/MOEMS 2001. Conference | 2001
Aarne Oja; Jukka Kyynäräinen; Heikki Seppä
The stability of micromechanical capacitive transducers depends on the stability of mechanical and electrical properties. Charges trapped on the native oxide layers of the micromechanical electrodes, can create significant electrostatic forces in the absence of an external biasing voltage. The amount of trapped charges fluctuate in time due to various tunneling processes and deteriorate long-term stability of capacitive MEMS sensors. We have investigated the electromechanical stability of commercial angular velocity sensors and low-g accelerometers and found drift rates on the order of 0.01 %/h even after several hours after a step in the bias voltage. After correcting for the drift due to charge tunneling using an empirical fitting functions we find mechanical stabilities in the level of ppm/h.
Archive | 2006
Heikki Seppä; Kirsi Tappura; Jussi Tuppurainen; Tomi Mattila; Ari Alastalo; Hannu Helle; Aarne Oja
Archive | 1999
Heikki Seppä; Aarne Oja; Mika Suhonen
Archive | 1999
Aarne Oja; Heikki Seppä; Teuvo Sillanp{umlaut over }
Techniques de l'ingénieur. Mesures et contrôle | 2007
Antti Manninen; Anna-Maija Kärkkäinen; Nadine Pesonen; Aarne Oja; Heikki Seppä
Archive | 2010
Timo Varpula; Aarne Oja; Heikki Seppä; Mika Suhonen
Archive | 1999
Heikki Seppä; Aarne Oja
Archive | 2010
Timo Varpula; Aarne Oja; Heikki Seppä; Mika Suhonen
arXiv: Instrumentation and Detectors | 2007
Antti Manninen; Anu Karkkainen; Nadine Pesonen; Aarne Oja; Heikki Seppä
Archive | 2005
Tomi Mattila; Aarne Oja; Olli Jaakkola; Heikki Seppä
Collaboration
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