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Featured researches published by Tomi Mattila.


international conference on micro electro mechanical systems | 2008

Temperature measurement and compensation based on two vibrating modes of a bulk acoustic mode microresonator

Mika Koskenvuori; Ville Kaajakari; Tomi Mattila; Ilkka Tittonen

A method to detect the temperature of a micromechanical resonator by measuring the frequency- shifts of two different eigenmodes is presented. The resonator is a square-extensional bulk-acoustic-resonator with two fundamental modes of vibration. The modes feature different temperature coefficients of the frequency and therefore by measuring the frequency change of both modes of vibration the temperature information can be deduced. The measured temperature is used to mathematically compensate for the temperature induced drift of the second eigenmode. The advantage of the demonstrated in-situ temperature measurement is that as no external temperature sensor is needed, the resonator temperature is accurately measured and hysteresis arising from different temperature time constants for heating and cooling of the sensor and resonator is eliminated.


Archive | 2005

Reference oscillator frequency stabilization

Tomi Mattila; Aarne Oja; Olli Jaakkola; Heikki Seppā


Archive | 2006

Micromechanical sensor, sensor array and method

Heikki Seppä; Kirsi Tappura; Jussi Tuppurainen; Tomi Mattila; Ari Alastalo; Hannu Helle; Aarne Oja


Archive | 2005

Multi-mode frequency synthesizer with temperature compensation

Tomi Mattila; Olli Jaakkola; Ville Kaajakari; Aarne Oja; Heikki Seppä


Archive | 2008

Structures based on nanoparticles and method for their fabrication

Tomi Mattila; Ari Alastalo; Mark Allen; Heikki Seppä


Archive | 2010

Method and products related to deposited particles

Mark Allen; Jaakko Leppäniemi; Tomi Mattila


Archive | 2008

Method for producing conductor structures and applications thereof

Tomi Mattila; Ari Alastalo; Mark Allen; Heikki Seppä


Archive | 2008

Method of fabricating structures based on nanoparticles

Tomi Mattila; Ari Alastalo; Mark Allen; Heikki Seppä


Archive | 2008

Electronics module, method for the manufacture thereof and applications

Tomi Mattila; Ari Alastalo; Mark Allen; Heikki Seppä


Archive | 2011

Sensor mit nichtlinearer resonanz und verfahren dafür

Ville Viikari; Heikki Seppä; Tomi Mattila; Ari Alastalo; Mark Allen; Timo Varpula

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Ari Alastalo

VTT Technical Research Centre of Finland

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Heikki Seppä

Centre for Metrology and Accreditation

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Mark Allen

VTT Technical Research Centre of Finland

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Ari Häärä

VTT Technical Research Centre of Finland

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Jaakko Leppäniemi

VTT Technical Research Centre of Finland

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Jussi Tuppurainen

VTT Technical Research Centre of Finland

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