Abdelkrim Talbi

Sezawa mode SAW pressure sensors based on ZnO/Si structure

Surface acoustic wave (SAW) devices have been shown to be suitable for many sensor applications. One of these applications is pressure sensor. In this study we investigate the performance of SAW pressure sensors formed with ZnO/Si(001) structure. The pressure sensitivities of Rayleigh mode as well as the Sezawa mode are studied as a function of normalized thickness (kh=2/spl pi/h/sub ZnO///spl lambda/). The experimental results show an opposite strain effect in the ZnO layer and Si substrate. A theoretical approach based on the perturbation method has been developed for the evaluation of pressure sensitivity in the Sezawa mode. Experimental and theoretical results obtained for the ZnO/Si SAW sensor prepared with kh=1.18 are in good agreement. For kh/spl les/1.2, the ZnO contribution to the sensor sensitivity can be neglected in the Sezawa mode in which ZnO acts mainly as an electromechanical conversion layer.

In situ high-temperature characterization of AlN-based surface acoustic wave devices

We report on in situ electrical measurements of surface acoustic wave delay lines based on AlN/sapphire structure and iridium interdigital transducers between 20 °C and 1050 °C under vacuum conditions. The devices show a great potential for temperature sensing applications. Burnout is only observed after 60 h at 1050 °C and is mainly attributed to the agglomeration phenomena undergone by the Ir transducers. However, despite the vacuum conditions, a significant oxidation of the AlN film is observed, pointing out the limitation of the considered structure at least at such extreme temperatures. Original structures overcoming this limitation are then proposed and discussed.

Legendre and Laguerre polynomial approach for modeling of wave propagation in layered magneto-electro-elastic media

A numerical method to compute propagation constants and mode shapes of elastic waves in layered piezoelectric-piezomagnetic composites, potentially deposited on a substrate, is described. The basic feature of the method is the expansion of particle displacement, stress fields, electric and magnetic potentials in each layer on different polynomial bases: Legendre for a layer of finite thickness and Laguerre for the semi-infinite substrate. The exponential convergence rate of the method for propagation of Love waves is numerically verified. The main advantage of the method is to directly determine complex wave numbers for a given frequency via a matricial eigenvalue problem, in a way that no transcendental equation has to be solved. Results are presented and the method is discussed.

Multilayer magnetostrictive structure based surface acoustic wave devices

This study addresses the experimental and theoretical investigations of guided elastic waves propagation in piezo-magnetic multi-layered structure. The structure is composed of a 20×TbCo2(5nm)/FeCo(5nm) nanostructured multi-layer deposited between two Aluminum (Al) Inter-Digitals Transducers forming a surface acoustic wave delay line, on a Y-cut LiNbO3 substrate. We compare the calculated and measured phase velocity variation under the action of the external magnetic field orientation and magnitude. We find quantitative agreement between the measured and modeled phase velocity shift for all external magnetic field configurations (hard axis and easy axis) and for different shape modes of elastic waves at their first and third harmonic operation frequencies. The shear horizontal mode exhibits a maximum phase velocity shift close to 20% for a ratio close to 1 between magneto-elastic film thickness and wavelength.

Synthetic jets based on micro magneto mechanical systems for aerodynamic flow control

A magneto-mechanical micro-actuator providing an axisymmetric synthetic microjet for active flow control was designed, fabricated and characterized. The micro-actuator consists of an enclosed cavity with a small orifice in one face and a high flexible elastomeric (PDMS) membrane in the opposite one. The membrane vibration is achieved using a magnetic actuation chosen for its capacity for providing large out of plane displacements and forces necessary for the performances aimed for. The paper presents first numerical simulations of the flow performed during the design process in order to identify a general jet formation criterion and optimize the devices performances. The fabrication process of this micro-magneto-mechanical system (MMMS) is then briefly described. The full size of the device, including packaging and actuation, does not exceed 1 cm3. The evaluation of the performances of the synthetic jet with 600 µm orifice was performed. The results show that the optimum working point is in the frequency range 400–700 Hz which is in accordance with the frequency response of the magnet-membrane mechanical resonator. In this frequency range, the microjet reaches maximum speeds ranging from 25 m s−1 to 55 m s−1 for an electromagnetic power consumption of 500 mW. Finally the axial velocity transient and stream-wise behaviours in the near and far fields are reported and discussed.

Finite element analysis and experimental study of surface acoustic wave propagation through two-dimensional pillar-based surface phononic crystal

We study both theoretically and experimentally the interaction of surface elastic waves with 2D surface phononic crystal (PnC) on a piezoelectric substrate. A rigorous analysis based on 3D finite element method is conducted to calculate the band structure of the PnC and to analyze the transmission spectrum (module and phase). Interdigital transducers (IDTs) are considered for electrical excitation and detection, and absorbing boundary conditions are used to suppress waves reflection from the edges. The PnCs are composed of an array of 20 Nickel cylindrical pillars arranged in a square lattice symmetry, and deposited on a LiNbO3 substrate (128°Y cut-X propagating) between two dispersive IDTs. We investigate by means of band diagrams and transmission spectrum the opening band-gaps originating from pillars resonant modes and from Bragg band-gap. The physical parameters that influence and determine their appearance are also discussed. Experimental validation is achieved through electrical measurement of the transmission characteristics, including amplitude and phase.

A robust thermal microstructure for mass flow rate measurement in steady and unsteady flows

A silicon micro-machined thermal gas flow sensor operating in anemometric mode has been designed, fabricated and investigated for continuous and pulsatile flows. The sensor is specifically designed to achieve high sensitivity, fast response time and high robustness. It is composed of four metallic resistors interconnected to form a Wheatstone bridge. Two of them act simultaneously as the heating and sensing elements and the two others are used as a temperature reference. The heating element consists of a metallic wire of platinum Pt (2 µm width, 2 mm length) maintained on each lateral side by periodic silicon oxide SiO2 micro-bridges. Finite element simulations show that this structure achieves a fast thermal response time of 200 µs in constant current operating mode and a coefficient of temperature rise close to 25 °C/120 µW based on bulk electrical resistivity and when the Pt wire and SiO2 thicknesses are close to 100 nm and 500 nm, respectively. This design allows the fabrication of a robust thermal flow sensor with heating elements as long as possible, which enables accurate measurements with high signal to noise ratio. The sensor is then characterised experimentally; its electrical and thermal properties are obtained in the absence of fluid flow. These results confirm the effectiveness of the thermal insulation as predicted by the simulations. In a second step, the fluidic characterizations are reported and discussed for both continuous and pulsatile flows. In continuous mode, the sensor response was studied for gas flow rate ranging from 0 L min−1 to 10 L min−1. In pulsatile mode, the sensor is integrated inside a channel of a micro-valve actuated at 200 Hz. The measurements are compared with those obtained by a classical commercial hot wire.

Theoretical and experimental evidence of Fano-like resonances in simple monomode photonic circuits

A simple photonic device consisting of two dangling side resonators grafted at two sites on a waveguide is designed in order to obtain sharp resonant states inside the transmission gaps without introducing any defects in the structure. This results from an internal resonance of the structure when such a resonance is situated in the vicinity of a zero of transmission or placed between two zeros of transmission, the so-called Fano resonances. A general analytical expression for the transmission coefficient is given for various systems of this kind. The amplitude of the transmission is obtained following the Fano form. The full width at half maximum of the resonances as well as the asymmetric Fano parameter are discussed explicitly as function of the geometrical parameters of the system. In addition to the usual asymmetric Fano resonance, we show that this system may exhibit an electromagnetic induced transparency resonance as well as well as a particular case where such resonances collapse in the transmissi...

Electromagnetically induced absorption in detuned stub waveguides: a simple analytical and experimental model.

We give an analytical and experimental demonstration of a classical analogue of the electromagnetic induced absorption (EIA) in a simple photonic device consisting of two stubs of lengths d1 and d2 grafted at the same site along a waveguide. By detuning the lengths of the two stubs (i.e. δ = d(2) - d(1)) we show that: (i) the amplitudes of the electromagnetic waves in the two stubs can be written following the two resonators model where each stub plays the role of a radiative resonator with low Q factor. The destructive interference between the waves in the two stubs may give rise to a sharp resonance peak with high Q factor in the transmission as well as in the absorption. (ii) The transmission coefficient around the resonance induced by the stubs can be written following a Fano-like form. In particular, we give an explicit expression of the position, width and Fano parameter of the resonances as a function of δ. (iii) By taking into account the loss in the waveguides, we show that at the transmission resonance, the transmission (reflection) increases (decreases) as a function of δ. Whereas the absorption goes through a maximum around 0.5 for a threshold value δth which depends on the attenuation in the system and then falls to zero. (iv) We give a comparison between the phase of the determinant of the scattering matrix, the so-called Friedel phase and the phase of the transmission amplitude. (v) The effect of the boundary conditions at the end of the resonators on the EIA resonance is also discussed. The analytical results are obtained by means of the Greens function method, whereas the experiments are carried out using coaxial cables in the radio-frequency regime. These results should have important consequences for designing integrated devices such as narrow-frequency optical or microwave filters and high-speed switches.

Pressure sensitivity of Rayleigh and Sezawa wave in ZnO/Si[001] structures

In this study we investigate the pressure effect on the guided waves in ZnO/Si[001] structures. Our experimental results reveal a strong dependence of the pressure sensitivities on the depth penetration of the waves. This dependence is explained by studying the effect of layer thickness and wavelength on the pressure sensitivity of Sezawa and Rayleigh wave. The measured results shows that strain compensation can be achieved in ZnO/Si structure. A theoretical results obtained by considering strain effect in silicon substrate alone are compared with measurements and show a good agreement in the case of Sezawa wave. Concerning the Rayleigh wave, the ZnO film effect should be taken in consideration in theoretical formulation.