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Publication


Featured researches published by Akihiro Kanaboshi.


Journal of Applied Physics | 1993

Direct bonding of quartz crystal onto silicon

Kazuo Eda; Akihiro Kanaboshi; Tetsuyoshi Ogura; Yutaka Taguchi

A new method to bond a quartz crystal onto a silicon substrate, fabricating a quartz‐crystal‐on‐silicon resonator, is reported together with its fabrication process, interface microstructure, and resonant characteristics. A one‐chip quartz crystal oscillator employing the quartz‐crystal‐on‐silicon resonator for mobile communication is also suggested.


Journal of the Acoustical Society of America | 2006

Surface acoustic wave device and method of manufacturing the same

Akihiro Kanaboshi; Masato Sugimoto; Yutaka Taguchi; Kazuo Eda


Archive | 1995

Method of manufacturing a piezoelectric acoustic wave device

Yoshihiro Tomita; Akihiro Kanaboshi; Yutaka Taguchi; Kazuo Eda


Archive | 1995

Methods of manufacture for electronic components having high-frequency elements

Kazuo Eda; Yutaka Taguchi; Akihiro Kanaboshi; Tetsuyoshi Ogura


Archive | 1992

Electro-acoustic hybrid integrated circuit and manufacturing method thereof

Kazuo Eda; Akihiro Kanaboshi; Tetsuyoshi Ogura; Yutaka Taguchi


Archive | 1994

Electronic component and method for producing the same

Kazuo Eda; Yoshihiro Tomita; Akihiro Kanaboshi; Masato Sugimoto


Archive | 1994

Electronic components having high-frequency elements and methods of manufacture therefor

Kazuo Eda; Yutaka Taguchi; Akihiro Kanaboshi; Tetsuyoshi Ogura


Archive | 1995

Method for producing an electronic component using direct bonding

Kazuo Eda; Yoshihiro Tomita; Akihiro Kanaboshi; Masato Sugimoto


Archive | 1996

Method of processing a piezoelectric device

Yutaka Taguchi; Kazuo Eda; Akihiro Kanaboshi; Tetsuyoshi Ogura; Yoshihiro Tomita


Archive | 1993

Quartz device and manufacturing method thereof

Akihiro Kanaboshi; Tetsuyoshi Ogura; Yutaka Taguchi; Kazuo Eda

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