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Akihiro Yago

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Publication

Featured researches published by Akihiro Yago.

Archive | 2006

Garium-nitride thin film bonding substrate, its manufacturing method, garium-nitride system semiconductor device, and its manufacturing method

Katsushi Akita; Hitoshi Kasai; Yasunori Miura; Akihiro Yago; 祥紀 三浦; 昭広 八郷; 勝史 秋田; 仁 笠井

Archive | 2009

Composite substrate, epitaxial substrate, semiconductor device, and method of manufacturing composite substrate

Yoko Maeda; Naoki Matsumoto; Fumitaka Sato; Akihiro Yago; 史隆 佐藤; 昭広 八郷; 洋子 前田; 直樹 松本

Archive | 2007

Group iii nitride semiconductor layer stuck substrate and semiconductor device

Akihiro Yago; 昭広 八郷

Archive | 1998

Piezoelectric compound substrate and surface acoustic wave element

Satoru Fujii; Kenjiro Higaki; Tomoyoshi Kamimura; Hideaki Nakahata; Shinichi Shikada; Haruhisa Toyoda; Akihiro Yago; 智喜 上村; 英章 中幡; 昭広 八郷; 賢次郎 桧垣; 知 藤井; 晴久 豊田; 真一 鹿田

Archive | 2009

Substrate with epitaxial layer, semiconductor element and these manufacturing method

Masato Irikura; Keiji Ishibashi; Seiji Nakahata; Akihiro Yago; 成二 中畑; 正登 入倉; 昭広 八郷; 恵二 石橋

Archive | 2006

CLEANING METHOD AND MANUFACTURING METHOD FOR NITRIDE COMPOUND SEMICONDUCTOR, AND COMPOUND SEMICONDUCTOR, AND BOARD

Takayuki Nishiura; Akihiro Yago; 昭広 八郷; 隆幸 西浦

Archive | 2005

Damage evaluation method on compound semiconductor member, manufacturing method for compound semiconductor member, potassium nitride compound semiconductor member, and potassium nitride compound semiconductor film

Keiji Ishibashi; Takayuki Nishiura; Akihiro Yago; 昭広 八郷; 恵二 石橋; 隆幸 西浦

Archive | 2009

複合基板、エピタキシャル基板、半導体デバイス及び複合基板の製造方法

Yoko Maeda; Naoki Matsumoto; Fumitaka Sato; Akihiro Yago; 史隆 佐藤; 昭広 八郷; 洋子 前田; 直樹 松本

Archive | 2007

Manufacturing method of group iii-v compound semiconductor substrate

Naoki Matsumoto; Takayuki Nishiura; Akihiro Yago; 昭広 八郷; 直樹 松本; 隆幸 西浦

Archive | 2006

Gallium nitride substrate, and its evaluation method and manufacturing method

Akihiro Yago; 昭広 八郷

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Collaboration

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Takayuki Nishiura

Sumitomo Electric Industries

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Keiji Ishibashi

Sumitomo Electric Industries

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Naoki Matsumoto

Sumitomo Electric Industries

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Fumitaka Sato

Sumitomo Electric Industries

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Yoko Maeda

Sumitomo Electric Industries

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Hideaki Nakahata

Sumitomo Electric Industries

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Hitoshi Kasai

Sumitomo Electric Industries

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Katsushi Akita

Sumitomo Electric Industries

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Kenjiro Higaki

Sumitomo Electric Industries

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Masato Irikura

Sumitomo Electric Industries

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