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Akiko Igarashi

Hitachi

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Publication

Featured researches published by Akiko Igarashi.

Archive | 2000

Polishing compound for chemimechanical polishing and polishing method

Takeshi Uchida; Yasuo Kamigata; Hiroki Terasaki; Yasushi Kurata; Tetsuya Hoshino; Akiko Igarashi

Archive | 2006

Polishing medium for chemical-mechanical polishing, and method of polishing substrate member

Yasushi Kurata; Yasuo Kamigata; Takeshi Uchida; Hiroki Terasaki; Akiko Igarashi

Archive | 2002

CMP (chemical mechanical polishing) polishing liquid for metal and polishing method

Yasushi Kurata; Yasuo Kamigata; Takeshi Uchida; Hiroki Terazaki; Akiko Igarashi

Archive | 2000

Polishing compound for chemimechanical polishing and method for polishing substrate

Yasushi Kurata; Yasuo Kamigata; Takeshi Uchida; Hiroki Terasaki; Akiko Igarashi

Archive | 1999

Liquid for polishing metal and method for polishing metal

Akiko Igarashi; Yasuo Kamigata; Yasushi Kurata; Hiroki Terasaki; Takeshi Uchida; 康雄 上方; 明子 五十嵐; 靖 倉田; 剛 内田; 裕樹 寺崎

Archive | 2000

Method for chemical-mechanical polishing of a substrate

Yasushi Kurata; Yasuo Kamigata; Takeshi Uchida; Hiroki Terasaki; Akiko Igarashi

Archive | 2006

Polishing medium for chemical-mechanical polishing, and polishing method

Takeshi Uchida; Yasuo Kamigata; Hiroki Terasaki; Yasushi Kurata; Tetsuya Hoshino; Akiko Igarashi

Archive | 1999

Metal polishing fluid and board polishing method using it

Akiko Igarashi; Yasuo Kamigata; Yasushi Kurata; Hiroki Terasaki; Takeshi Uchida; 康雄 上方; 明子 五十嵐; 靖 倉田; 剛 内田; 裕樹 寺崎

Archive | 1999

Polishing solution for metal and method of polishing substrate using same

Akiko Igarashi; Yasuo Kamigata; Yasushi Kurata; Hiroki Terasaki; Takeshi Uchida; 康雄 上方; 明子 五十嵐; 靖 倉田; 剛 内田; 裕樹 寺崎

Archive | 2012

POLISHING AGENT FOR CHEMICAL MECHANICAL POLISHING

Yasushi Kurata; Yasuo Kamigata; Takeshi Uchida; Hiroki Terasaki; Akiko Igarashi; 康雄 上方; 明子 五十嵐; 靖 倉田; 剛 内田; 裕樹 寺崎

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Collaboration

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Takeshi Uchida

Hitachi

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Yasuo Kamigata

Hitachi

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Yasushi Kurata

Hitachi

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Hiroki Terasaki

Hitachi

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Tetsuya Hoshino

Hitachi

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Hiroki Terazaki

Hitachi

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