Akinori Oda

One-dimensional modelling of low-frequency and high-pressure Xe barrier discharges for the design of excimer lamps

A self-consistent one-dimensional modelling of a Xe gas discharge between electrodes covered with dielectric barrier is presented for power frequencies from 50 kHz to 1 MHz and gas pressures from 10 to 400 Torr. Spatiotemporal profiles of the concentration of electrons, ions, excited atoms and excimers are obtained. Excimers are mainly produced in the sheath regions. The efficiencies of spontaneous emission from excimers and resonance-state atoms increase with an increase in the input powers for gas pressures higher than 50 Torr. A characteristic period during which the barrier wall charge significantly influences the electric field in bulk region was found, and discharge properties in the period are discussed.

Transient behaviour of CF4 rf plasmas after step changes of power source voltage

CF4 radio-frequency (rf) plasmas are often driven in time-modulation modes to obtain higher etching performance. For dynamic and stable control of CF4 plasmas, we investigated the transient behaviour of the plasmas after step up or down of the amplitude of the power source voltage Vs(t). Using a one-dimensional fluid model, we simulated a CF4 capacitively coupled plasma that transfers from a periodic steady state to another at 0.2 Torr in a 20 mm parallel-plate gap. In addition, we compared such plasma responses to the step down to 0 V at the phases at which Vs(t) takes zero and peak values. Fundamental properties of transient CF4 plasmas were discussed.

The drift velocity vector of electron swarms in crossed electric and magnetic fields

We calculated the drift velocity vector W of electron swarms in crossed electric and magnetic fields using a Monte Carlo method. Values of W in F2, CF4 and constant-collision-frequency (CCF) model gases at various values of the reduced electric and magnetic fields, E/N and B/N (N is the gas molecule number density), were illustrated as vector loci in velocity space. Under a CCF condition, W draws right semicircular loci with varying B and N at a constant E when the number of electrons is conservative. These semicircular loci can be a reference to characterize the W behaviour in real gases. We presented an analytical derivation of W in the CCF condition, extending its expression to that in the presence of ionization and attachment. Features of the vector loci in F2 and CF4 were discussed.