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Peter L. G. Ventzek

Tokyo Electron

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Publication

Featured researches published by Peter L. G. Ventzek.

Archive | 2006

Method of treating a mask layer prior to performing an etching process

Peter L. G. Ventzek; Lee Chen; Akira Koshiishi; Ikuo Sawada

Archive | 2008

Hollow cathode device and method for using the device to control the uniformity of a plasma process

Kazuki Denpoh; Peter L. G. Ventzek; Lin Xu; Lee Chen

Archive | 2014

CAPACITIVELY COUPLED PLASMA EQUIPMENT WITH UNIFORM PLASMA DENSITY

Ikuo Sawada; Peter L. G. Ventzek

Archive | 2014

Pulsed gas plasma doping method and apparatus

Peter L. G. Ventzek; Takenao Nemoto; Hirokazu Ueda; Yuuki Kobayashi; Masahiro Horigome

Archive | 2016

METHODS FOR HIGH PRECISION PLASMA ETCHING OF SUBSTRATES

Mingmei Wang; Alok Ranjan; Peter L. G. Ventzek

Archive | 2011

Plasma-Tuning Rods in Surface Wave Antenna (SWA) Sources

Jianping Zhao; Lee Chen; Merritt Funk; Toshihiko Iwao; Peter L. G. Ventzek

Archive | 2011

Plasma tuning rods in microwave processing systems

Jianping Zhao; Lee Chen; Merritt Funk; Toshihiko Iwao; Peter L. G. Ventzek

Archive | 2008

RLSA CVD deposition control using halogen gas for hydrogen scavenging

Jozef Brcka; Song Yun Kang; Toshio Nakanishi; Peter L. G. Ventzek; Minoru Honda; Masayuki Kohno

Archive | 2014

Integrated induction coil and microwave antenna as an all-planar source

Peter L. G. Ventzek; Lee Chen

Archive | 2012

RADIO FREQUENCY (RF) POWER COUPLING SYSTEM UTILIZING MULTIPLE RF POWER COUPLING ELEMENTS FOR CONTROL OF PLASMA PROPERTIES

Barton Lane; Lee Chen; Peter L. G. Ventzek; Merritt Funk; Jianping Zhao; Radha Sundararajan

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Lee Chen

Tokyo Electron

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Jianping Zhao

Tokyo Electron

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Merritt Funk

Tokyo Electron

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Toshihiko Iwao

Tokyo Electron

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Alok Ranjan

Tokyo Electron

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Barton Lane

Tokyo Electron

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Iwao Toshihiko

Tokyo Electron

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Yuuki Kobayashi

Tokyo Electron

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Hirokazu Ueda

Tokyo Electron

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Ikuo Sawada

Tokyo Electron

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