Is this you? Create Your Porfile
Avatar

Akira Fujimura

JEOL Ltd.

Network

Latest external collaboration on country level. Dive into details by clicking on the dots.

Explore More

Hotspot

Dive into the research topics where Akira Fujimura is active.

Explore More

Publication

Featured researches published by Akira Fujimura.

Archive | 2010

Method for design and manufacture of a reticle using a two-dimensional dosage map and charged particle beam lithography

Akira Fujimura; Harold Robert Zable

Archive | 2011

Method for Fracturing and Forming a Pattern Using Curvilinear Characters with Charged Particle Beam Lithography

Akira Fujimura; Michael Tucker

Archive | 2009

Method for design and manufacture of a reticle using variable shaped beam lithography

Akira Fujimura; Michael Tucker

Archive | 2009

METHOD FOR FRACTURING CIRCULAR PATTERNS AND FOR MANUFACTURING A SEMICONDUCTOR DEVICE

Akira Fujimura; Michael Tucker

Archive | 2011

METHOD AND SYSTEM FOR FORMING PATTERNS USING CHARGED PARTICLE BEAM LITHOGRAPHY WITH OVERLAPPING SHOTS

Akira Fujimura; Harold Robert Zable

Archive | 2009

METHOD AND SYSTEM FOR FRACTURING A PATTERN USING CHARGED PARTICLE BEAM LITHOGRAPHY WITH MULTIPLE EXPOSURE PASSES WHICH EXPOSE DIFFERENT SURFACE AREA

Harold Robert Zable; Akira Fujimura

Archive | 2013

METHOD FOR FRACTURING AND FORMING A PATTERN USING SHAPED BEAM CHARGED PARTICLE BEAM LITHOGRAPHY

Akira Fujimura; Michael Tucker

Archive | 2009

METHOD AND SYSTEM FOR FORMING CIRCULAR PATTERNS ON A SURFACE

Akira Fujimura; Michael Tucker

Archive | 2009

Method for Fracturing a Pattern for Writing with a Shaped Charged Particle Beam Writing System Using Dragged Shots

Akira Fujimura; Harold Robert Zable; Michael Tucker

Archive | 2011

METHOD, DEVICE, AND SYSTEM FOR FORMING CIRCULAR PATTERNS ON A SURFACE

Akira Fujimura; Michael Tucker

Explore More

Collaboration

Dive into the Akira Fujimura's collaboration.

Top Co-Authors
Avatar

Michael Tucker

JEOL Ltd.

View shared research outputs
Top Co-Authors
Avatar

Harold Robert Zable

JEOL Ltd.

View shared research outputs
Top Co-Authors
Avatar

Takashi Komagata

JEOL Ltd.

View shared research outputs
Explore More
Researchain Logo
Decentralizing Knowledge