Akira Miyaji

Thermal and deformation analyses of side-cooled monochromator mirrors for the SPring-8/Figure-8 soft X-ray undulator.

The numerical results for a bent parabolic mirror monochromator designed for the SPring-8/Figure-8 soft X-ray undulator are described. A thermal and structural finite-element analysis is presented for side-cooled premirrors of the bent parabolic mirror monochromator. Using a ray-tracing code, the effect of the final induced figure errors on the performance of the premirror are discussed.

Excimer Laser Stepper for Sub-half Micron Lithography

An excimer laser stepper having a flat image field was developed. Using a frequency stabilized, narrow band KrF 248nm laser (FWHM≈3μm), this stepper can print uniform patterns under 0.5 μm over a 15 mm square field. When the excimer laser output power is 2W, illumination intensity is more than 40 mW/cm2. Illumination uniformity is within ±2.5% over the field and exposure energy density is controlled within the precision of ±1.596, using an integrator sensor and a pulse number controller. A chromatic projection lens is adjusted so finely that aberrations are removed. In order to get imaging stability, a lens controller is used. An alignment system is off-axis, using He-Ne laser light spots and diffraction light detectors. By employing the EGA (Enhanced Global Alignment) method, overlay accuracy better than 0.18μm was obtained. Because the alignment detection light is insensitive to the resist, any types of resist may be used. The developed system has all the basic functions of a stepper. It can be used to improve DUV process and to fabricate sub-half micron devices in a laboratory.

Microfocusing of soft X-ray undulator light using an elliptically bent cylinder mirror

Abstract The performance of an elliptically bent cylinder mirror, installed in A-branch of the Soft X-ray photochemistry beamline (BL27SU) at the SPring-8, is described. The aim of this branch beamline is to provide a micro white-beam focusing for a need in photochemistry community. This elastically bent mirror is the key component for the extremely intense micro-beam focusing optics.

Design of and metrological results from a bent parabolic mirror

This article describes the successful design and fabrication of, and metrological results from, an elastically bent parabolic mirror. The mirror is equipped with a bending structure that allows the mirror to be bent meridionally to a parabolic shape. This bent parabolic mirror is the key component of the extremely high-quality monochromators designed for the SPring-8 figure-8 soft X-ray undulator and the 2.0 GeV high-brilliance synchrotron radiation source (VSX).