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Akira Yonemizu

Tokyo Electron

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Publication

Featured researches published by Akira Yonemizu.

Archive | 1994

Double-sided substrate cleaning apparatus

Hiroyuki Matsukawa; Akira Yonemizu; Michiaki Matsushita; Akihiro Fujimoto; Takashi Takekuma; Hidetami Yaegashi; Takahide Fukuda

Archive | 1997

Double-sided substrate cleaning apparatus and cleaning method using the same

Hiroyuki Matsukawa; Akira Yonemizu; Michiaki Matsushita; Akihiro Fujimoto; Takashi Takekuma; Hidetami Yaegashi; Takahide Fukuda

Archive | 1997

Method for wet etching of thin film

Hiroki Taniyama; Miyako Yamasaka; Hiroyuki Kudou; Akira Yonemizu

Archive | 1996

Cleaning apparatus for cleaning substrates

Akira Yonemizu; Masami Akimoto

Archive | 1997

Method for cleaning substrates

Akira Yonemizu; Masami Akimoto

Archive | 1996

Resist treating method

Hiroyuki Matsukawa; Akira Yonemizu; Michiaki Matsushita; Akihiro Fujimoto; Takashi Takekuma; Hidetami Yaegashi; Takahide Fukuda

Archive | 1997

Processing apparatus for target processing substrate

Akira Yonemizu; Hiroyuki Kudou; Masami Akimoto

Archive | 2001

Heat treatment method, heat treatment apparatus and treatment system

Yuji Matsuyama; Yoji Mizutani; Shinji Nagashima; Akira Yonemizu

Archive | 1997

Method for processing through wafer rotation and its device

Hiroyuki Kudo; Hiromi Taniyama; Miyako Yamasaka; Akira Yonemizu; 都 山坂; 裕幸 工藤; 昭 米水; 博己 谷山

Archive | 1998

Method for washing both surfaces of a substrate

Akira Yonemizu; Yuji Matsuyama

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Akira Ishihara

Tokyo Electron

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Takanori Miyazaki

Tokyo Electron

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Akihiro Fujimoto

Tokyo Electron

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Masami Akimoto

Tokyo Electron

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Yuji Matsuyama

Tokyo Electron

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Hidetami Yaegashi

Tokyo Electron

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Hiroyuki Kudou

Tokyo Electron

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Hiroyuki Matsukawa

Tokyo Electron

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Michiaki Matsushita

Tokyo Electron

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Takahide Fukuda

Tokyo Electron

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