Masami Akimoto

Network

Latest external collaboration on country level. Dive into details by clicking on the dots.

Explore More

Hotspot

Dive into the research topics where Masami Akimoto is active.

Explore More

Publication

Featured researches published by Masami Akimoto.

Robotics and Computer-integrated Manufacturing | 1993

Kiyohisa Tateyama; Masami Akimoto; Mitsuru Ushijima

A resist process system of the present invention includes at least two robots for conveying a wafer, a passage through which the robots can move, plural process units arranged along the passage, and a waiting unit for temporarily holding the wafer which is to be processed. The waiting unit is arranged beside the passage and between the process units and it includes plural compartments partitioned in it.

Japanese Journal of Applied Physics | 2000

Shinichi Ito; Tatsuhiko Ema; Takahiro Kitano; Kohtaro Sho; Yukihiko Esaki; Masateru Morikawa; Kazuhiro Takeshita; Masami Akimoto; Katsuya Okumura

A novel nozzle-scan coating (NS-coating) method is useful for reducing the coated volume and its cost. We define the (waste-fluid rate) WFR as the ratio of the waste fluid to the fluid supplied on the wafer. In conventional spin-coating, the WFR is about 1500%. In the case of the extrusion-spin coating, the WFR decreases to 203%. But using the NS-coating with low speed and large acceleration, the WFR of the raw materials drastically decreased to 30%. This paper introduces some lithographic performances of NS-coating film of KrF chemical amplified resist that was coated with low WFR condition.

Archive | 2012