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Akiyama Shoji

East Tennessee State University

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Publication

Featured researches published by Akiyama Shoji.

Archive | 2000

CRYSTAL DEFECT DETECTING METHOD FOR SILICON WAFER, CRYSTAL DEFECT EVALUATING METHOD, AND OXIDE FILM BREAKDOWN VOLTAGE CHARACTERISTICS EVALUATING METHOD

Akiyama Shoji; Kobayashi Norihiro

Archive | 2001

METHOD OF FORMING SILICON OXIDE FILM AND SILICON NITRIDE OXIDE FILM, AND SILICON WAFER

Akiyama Shoji; Kobayashi Norihiro; Otsuki Takeshi

Archive | 2001

METHOD FOR PRODUCING SINGLE CRYSTAL SILICON WAFER FOR PARTICLE MONITOR

Akiyama Shoji; Tamazuka Masaro; Kobayashi Norihiro

Archive | 2000

PRODUCTION OF SILICON WAFER AND SILICON WAFER

Kobayashi Norihiro; Akiyama Shoji; Abe Takao

Archive | 2000

SILICON WAFER AND HEAT TREATMENT THEREOF

Kobayashi Norihiro; Akiyama Shoji; Matsumoto Yuichi; Tamazuka Masaro

Archive | 2008

SINGLE CRYSTAL SiC AND METHOD FOR PRODUCING THE SAME

Akiyama Shoji; Ikari Masanori; Abe Takao

Archive | 2008

SINGLE-CRYSTAL SIC AND PROCESS FOR PRODUCING THE SAME

Akiyama Shoji; Ikari Masanori; Abe Takao

Archive | 2002

Manufacturing method for silicon wafer

Kobayashi Norihiro; Akiyama Shoji; Tamatsuka Masaro; Shinomiya Masaru; Matsumoto Yuichi

Archive | 2001

Si wafer and method for producing it

Kobayashi Norihiro; Akiyama Shoji

Archive | 2008

SILIZIUMWAFER UND VERFAHREN ZU DESSEN HERSTELLUNG

Kobayashi Norihiro; Akiyama Shoji; Abe Takao

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Kobayashi Norihiro

East Tennessee State University

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Abe Takao

East Tennessee State University

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