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Kobayashi Norihiro

East Tennessee State University

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Publication

Featured researches published by Kobayashi Norihiro.

Archive | 2006

SOI WAFER AND MANUFACTURING METHOD THEREOF

Aga Koji; Kobayashi Norihiro; Imai Masayuki; Enomoto Tatsuo; Takeno Hiroshi

Archive | 2007

METHOD FOR MANUFACTURING LAMINATED SOI WAFER

Kobayashi Norihiro; Aga Koji; Yokogawa Isao; Ishizuka Toru; Kato Masahiro

Archive | 2009

SOI WAFER AND SEMICONDUCTOR DEVICE, AND METHOD OF MANUFACTURING THE SOI WAFER

Ishizuka Toru; Noto Nobuhiko; Kobayashi Norihiro; Nakano Masatake

Archive | 1999

Heat treatment method for monocrystalline silicon wafers

Abe Takao; Kobayashi Norihiro; Kato Masahiro

Archive | 2002

THERMAL PROCESSING METHOD OF SILICON WAFER

Kobayashi Norihiro; Tamazuka Masaro

Archive | 2000

CRYSTAL DEFECT DETECTING METHOD FOR SILICON WAFER, CRYSTAL DEFECT EVALUATING METHOD, AND OXIDE FILM BREAKDOWN VOLTAGE CHARACTERISTICS EVALUATING METHOD

Akiyama Shoji; Kobayashi Norihiro

Archive | 2001

METHOD OF FORMING SILICON OXIDE FILM AND SILICON NITRIDE OXIDE FILM, AND SILICON WAFER

Akiyama Shoji; Kobayashi Norihiro; Otsuki Takeshi

Archive | 1999

SINGLE CRYSTAL SILICON WAFER AND HEAT TREATMENT METHOD THEREOF

Abe Takao; Kobayashi Norihiro; Kato Masahiro

Archive | 2007

Manufacturing method of laminated wafer

Ishizuka Toru; Kobayashi Norihiro; Oka Tetsushi; Kato Masahiro; Noto Nobuhiko

Archive | 2002

METHOD OF CLEANING TUBE FOR HEAT TREATMENT OF SEMICONDUCTOR SUBSTRATE, AND METALLIC CONTAMINATION GETTER SUBSTRATE, AND REGENERATIVE METAL CONTAMINATION GETTER SUBSTRATE

Kobayashi Norihiro; Tamazuka Masaro; Nagoya Takatoshi; Magari Takemine

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Akiyama Shoji

East Tennessee State University

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Abe Takao

East Tennessee State University

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Aga Hiroji

East Tennessee State University

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Meguro Kenji

East Tennessee State University

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Wakabayashi Hiroshi

East Tennessee State University

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