Akiyoshi Tsuda
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Publication
Featured researches published by Akiyoshi Tsuda.
Photomask and Next-Generation Lithography Mask Technology XX | 2013
Hirofumi Hayakawa; Masahiro Takizawa; Masaki Kurokawa; Akiyoshi Tsuda; Masami Takigawa; Shinichi Hamaguchi; Akio Yamada; Kiichi Sakamoto; Takayuki Nakamura
For multi-purpose applications such as advanced LSIs, photonics, MEMS, and other nano- fabrications, it is important for electron beam (EB) writers that handle the various substrates with their own single mechanical platform. We have been developing the adjusting pallet function both 200mm and 300mm bases to satisfy this requirement. By analyzing actual examples of adjusting pallets we proved their effectiveness to their applications. The combination of adjusting pallet function, 1Xnm resolution column and character projection technologies will enable the next generation EB writer “F7000” to fit from Fab to Lab applications.
Archive | 1998
Nobuyuki Yasutake; Yoshihisa Ooae; Kazushi Ishida; Hiroshi Yasuda; Akiyoshi Tsuda; Hitoshi Tanaka
Archive | 1998
Yoshihisa Daikyo; Kazuji Ishida; Hitoshi Tanaka; Akiyoshi Tsuda; Hiroshi Yasuda; 義久 大饗; 洋 安田; 章義 津田; 仁志 田中; 和司 石田
Archive | 1997
Kenichi Kawakami; Tatsuro Ohkawa; Kazushi Ishida; Akiyoshi Tsuda
Archive | 1997
Kazushi Ishida; Kenichi Kawakami; Tatsuro Ohkawa; Akiyoshi Tsuda
Archive | 2014
Hirofumi Hayakawa; Akiyoshi Tsuda
Archive | 2014
Hirofumi Hayakawa; Akiyoshi Tsuda
Archive | 2013
Kenji Abe; Masaki Kurokawa; Akiyoshi Tsuda; Hideki Nasuno
Archive | 2013
Hirofumi Hayakawa; Akiyoshi Tsuda
Archive | 2013
Hirofumi Hayakawa; Akiyoshi Tsuda
