Alain Inard
Philips
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Publication
Featured researches published by Alain Inard.
european solid-state device research conference | 2001
M.M. Lunenborg; W. De Coster; Josephus F. A. M. Guelen; Alain Inard
A modified method for STI fabrication is proposed in which sacrificial nitride spacers are used during the channel and well implant sequence after shallow trench isolation formation. The spacers counteract the effect of reduced threshold voltage and loss of dopant concentration at the channel edges, thereby significantly reducing Vt roll-down with narrow channel width and the sub-threshold hump effect. Their use is transparent in the process flow and can be selectively applied to the nMOS or pMOS devices or to both.
Archive | 2003
Srdjan Kordic; Alain Inard; Céline Roussel; Philippe Gayet
Archive | 2001
Alain Inard; Dominique Zulian; Didier Levy; Meindert Lunenborg; Walter Jan August De Coster; Jean Claude Oberlin
Archive | 2001
Meindert Lunenborg; Walter Jan August De Coster; Alain Inard; Franck Arnaud
Archive | 2001
Walter Jan August De Coster; Meindert Lunenborg; Alain Inard; Jos Guelen
Archive | 2003
Srdjan Kordic; Céline Roussel; Alain Inard
Archive | 2003
Srdjan Kordic; Alain Inard; Céline Roussel; Philippe Gayet
Archive | 2003
Alain Inard; Srdjan Kordic; Céline Roussel
Archive | 2003
Alain Inard; Srdjan Kordic; Céline Roussel
Archive | 2001
Coster Walter De; Alain Inard; Didier Levy; Meindert Lunenborg; Jean-Claude Oberlin; Dominique Zulian
