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Alan J. Jensen

Lam Research

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Publication

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Archive | 2001

Chemical mechanical planarization or polishing pad with sections having varied groove patterns

Alan J. Jensen; Brian Thornton

Solid State Technology | 2001

Empirical-based modeling for control of CMP removal uniformity

Alan J. Jensen; Peter Renteln; Stephen Jew; Chris Raeder; Patrick Cheung

Archive | 1997

Roller with treading and system including the same

Alan J. Jensen; Norman A. Mertke; William Dyson; Lynn Ryle; Patrick Paino

Archive | 2000

Method of optimizing chemical mechanical planarization process

Alan J. Jensen; Cangshan Xu

Archive | 2003

Method and apparatus for controlling CMP pad surface finish

Alan J. Jensen; Mario Stella; Eugene Zhao; Peter Renteln; Jeffrey J. Farber

Archive | 2002

Fluid venting platen for optimizing wafer polishing

Travis R. Taylor; Alan J. Jensen

Archive | 1999

Method for processing a substrate using a system having a roller with treading

Alan J. Jensen; Norman A. Mertke; William Dyson; Lynn Ryle; Patrick Paino

Archive | 2005

Gas mixture for removing photoresist and post etch residue from low-k dielectric material and method of use thereof

Cristian Paduraru; Alan J. Jensen; David Schaefer; Robert Charatan; Tom Choi

Archive | 2002

Method and apparatus for conditioning fixed-abrasive polishing pads

Peter Renteln; Alan J. Jensen; David S. Lamb

Archive | 2013

PULSED DIELECTRIC ETCH PROCESS FOR IN-SITU METAL HARD MASK SHAPE CONTROL TO ENABLE VOID-FREE METALLIZATION

Ananth Indrakanti; Bhaskar Nagabhirava; Alan J. Jensen; Tom Choi

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Lynn Ryle

Lam Research

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Norman A. Mertke

Lam Research

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Patrick Paino

Lam Research

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William Dyson

Lam Research

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Peter Renteln

Lam Research

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Tom Choi

Lam Research

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Ananth Indrakanti

Lam Research

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Bhaskar Nagabhirava

Lam Research

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Brian Thornton

Lam Research

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Cangshan Xu

Lam Research

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