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Tom Choi

Lam Research

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Publication

Featured researches published by Tom Choi.

Archive | 2006

Trilayer resist organic layer etch

Sean S. Kang; Sang Jun Cho; Tom Choi; Taejoon Han

Archive | 2001

Method for improving uniformity and reducing etch rate variation of etching polysilicon

Tuqiang Ni; Kenji Takeshita; Tom Choi; Frank Y. Lin; Wenli Collison

Archive | 2001

Vacuum plasma processor apparatus and method

Tuqiang Ni; Kenji Takeshita; Tom Choi; Frank Y. Lin

Archive | 2007

Methods of and apparatus for reducing amounts of particles on a wafer during wafer de-chucking

Sangjun Cho; Sean Kang; Tom Choi; Taejoon Han

Archive | 2005

Gas mixture for removing photoresist and post etch residue from low-k dielectric material and method of use thereof

Cristian Paduraru; Alan J. Jensen; David Schaefer; Robert Charatan; Tom Choi

Archive | 2008

In-situ photoresist strip during plasma etching of active hard mask

Sangjun Cho; Tom Choi; Taejoon Han; Sean Kang; Prabhakara Gopaladasu; Bi-Ming Yen

Archive | 2006

Semiconductor processing including etched layer passivation using self-assembled monolayer

Taejoon Han; Sangjun Cho; Sung-Jin Cho; Tom Choi; Prabhakara Gopaladasu; Sean Kang

Archive | 2013

PULSED DIELECTRIC ETCH PROCESS FOR IN-SITU METAL HARD MASK SHAPE CONTROL TO ENABLE VOID-FREE METALLIZATION

Ananth Indrakanti; Bhaskar Nagabhirava; Alan J. Jensen; Tom Choi

Archive | 2007

ORGANIC LAYER ETCHING BY THREE-LAYER RESIST

Sang Jun Cho; Tom Choi; Taejoon Han; Sean S. Kang; サン・ジュン・チョ; ショーン・エス．・カン; タエジュン・ハン; トム・チョイ

Archive | 2014

Pulsed dielectric etch process for in-situ metal hard mask shape control

Bhaskar Nagabhirava; Tom Choi; Alan J. Jensen; Ananth Indrakanti

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Collaboration

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Kenji Takeshita

Lam Research

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Frank Y. Lin

Lam Research

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Tuqiang Ni

Lam Research

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Taejoon Han

Lam Research

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Wenli Collison

Lam Research

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Alan J. Jensen

Lam Research

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Sangjun Cho

Lam Research

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Sean Kang

Lam Research

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Ananth Indrakanti

Lam Research

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Bhaskar Nagabhirava

Lam Research

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