Alexander I. Vilensky

Thick films of X-ray polycrystalline mercuric iodide detectors

Polycrystalline HgI 2 thick film detectors are among the leading semiconductor materials to be used as direct converters in X-ray digital radiography. Their properties along with a survey of the properties of alternative materials, such as PbI 2 or A-Se, will be given. The preparation of HgI 2 detector plates, both by direct evaporation (Physical vapor deposition, (PVD)) and by binding the individual crystallites with polymeric glue, forming screen-printed (SP) detector plates, will be described. The microstructure of the PVD thick films showing a columnar morphology, as determined by SEM measurements, will be shown. The X-ray response to radiological X-ray generator of 85 kVp using the current integration mode will be reported for both PVD and SP films. Finally, some X-ray images taken at Xerox-Parc using HgI 2 polycrystalline detectors will be shown.

Polycrystalline mercuric iodide detectors

The fabrication of polycrystalline HgI2 thick film detectors using the hot wall physical vapor deposition, method is described. The X-ray response of these detectors to a radiological X-ray generator of 60 kVp has been studied using the current integration mode. The response expressed in (mu) A, the dark current expressed in pA/cm2 and sensitivity expressed in (mu) C/R(DOT)cm2 are given for these detectors for several thickness and grain sizes. The optimal sensitivity is compared with published data on the response to X-rays by polycrystalline PbI2 and A-Se detectors.

Mercuric iodide and lead iodide x-ray detectors for radiographic and fluoroscopic medical imaging

Mercuric iodide (HgI2) and lead iodide (PbI2) have been under development for several years as direct converter layers in digital x-ray imaging. Previous reports have covered the basic electrical and physical characteristics of these and several other materials. We earlier reported on 5cm x 5cm and 10cm x 10cm size imagers, direct digital radiography X-ray detectors, based on photoconductive polycrystalline mercuric iodide deposited on a flat panel thin film transistor (TFT) array, as having great potential for use in medical imaging, NDT, and security applications. This paper, presents results and comparison of both lead iodide and mercuric iodide imagers scaled up to 20cm x 25cm sizes. Both the mercuric iodide and lead iodide direct conversion layers are vacuum deposited onto TFT array by Physical Vapor Deposition (PVD). This process has been successfully scaled up to 20cm x 25cm -- the size required in common medical imaging applications. A TFT array with a pixel pitch of 127 microns was used for this imager. In addition to increasing detector size, more sophisticated, non-TFT based small area detectors were developed in order to improve analysis methods of the mercuric and lead iodide photoconductors. These small area detectors were evaluated in radiographic mode, continuous fluoroscopic mode and pulsed fluoroscopic mode. Mercuric iodide coating thickness ranging between 140 microns and 300 microns and lead iodide coating thickness ranging between 100 microns and 180 microns were tested using beams with energies between 40 kVp and 100 kVp, utilizing exposure ranges typical for both fluoroscopic and radiographic imaging. Diagnostic quality radiographic and fluoroscopic images have been generated at up to 15 frames per second. Mercuric iodide image lag appears adequate for fluoroscopic imaging. The longer image lag characteristics of lead iodide make it only suitable for radiographic imaging. For both material the MTF is determined primarily by the aperture and pitch of the TFT array (Nyquist frequency of ~3.93 mm-1 (127 micron pixel pitch).

Comparative study of Pbl2 and Hgl2 as direct detector materials for high-resolution x-ray image sensors

X-ray imaging properties are reported for HgI2 and PbI2, as candidate materials for future direct detection x- ray image sensors, including the first results from screen- printed HgI2 arrays. The leakage current of PbI2 is reduced by using new deposition conditions, but is still larger than HgI2. Both HgI2 and PbI2 have high spatial resolution but new data shows that the residual image spreading of PbI2 is not due to k-edge fluorescence and its possible origin is discussed. HgI2 has substantially higher sensitivity than PbI2 at comparable bias voltages, and we discuss the various loss mechanisms. Unlike PbI2, HgI2 shows a substantial spatially non-uniform response that is believed to originate from the large grain size, which is comparable to the pixel size. We obtain zero spatial frequency DQE values of 0.7 - 0.8 with PbI(subscript 24/ under low energy exposure conditions. A model for signal generation in terms of the semiconducting properties of the materials is presented.

Mercuric iodide thick films for radiological X-ray detectors

For the first time polycrystalline HgI2 photoconductor material directly evaporated on a-Si array for direct conversion of x-rays for imaging purposes, were successfully imaged at Xerox-Palo Alto Research Center. The initial results are very promising and show a high x-ray sensitivity and low leakage current. Since Ti-W alloys are used as pixel electrodes, an intermediate passivation layer must be used to prevent a chemical reaction with the detector plate. The thickness that these Polycrystalline HgI2 thick film detectors have been fabricated until now is up to 1,800 micrometers , which makes them useful also for high energy applications. The characterization of the Polycrystalline HgI2 thick films deposited with or without the passivation layers by measuring their dark currents, sensitivity to 65 and 85 kVp x-rays and residual signals after 1 minute of biasing, will be shown for several detectors. Some preliminary results will be shown for some novel screen-printed HgI2 detectors.

Radiological x-ray response of polycrystalline mercuric-iodide detectors

A first image of some tiny screws were obtained for the first time with polycrystalline HgI2 acting as the photoconductor material deposited on a-Si direct conversion X- ray image sensors, produced by Xerox -- Palo Alto Research Center. The initial results are very promising and show a high X-ray sensitivity and low leakage current. The response of these detectors to a radiological X-ray generator of 65 kVp has been studied using the current integration mode. Already its sensitivity expressed in (mu) C/R*cm2, is very high, values of 20 (mu) C/R*cm2 have been measured for films of 100 - 250 microns thickness and bias of 50 - 200 volts respectively, which is superior to the published data for competing materials such as polycrystalline PbI2 and a-Se detectors. The fabrication and characterization measurements of the Polycrystalline HgI2 thick film detectors will be given. The characterization data which will be reported here consists of: (a) sensitivity, (b) dark currents, (c) stability of sensitivity dependence on the number of exposure, (d) X-ray response dependence on dose energy and (e) signal decay dependence on the number of exposures.

High-resolution x-ray image sensors based on HgI2

Measurements of polycrystalline HgI2 films on active matrix direct detection image sensors are described, for possible application to high sensitivity room temperature x- ray detection. The arrays exhibit low leakage current and very high sensitivity - roughly an order of magnitude better than has been demonstrated with other designs. The uniformity of the response varies randomly from pixel to pixel, for reasons that are not yet understood, but are probably related to the large grain size.

Large-area mercuric iodide x-ray imager

Single crystals of mercuric iodide have been studied for many years for nuclear detectors. We have investigated the use of x-ray photoconductive polycrystalline mercuric iodide coatings on amorphous silicon flat panel thin film transistor (TFT) arrays as x-ray detectors for radiographic and fluoroscopic applications in medical imaging. The mercuric iodide coatings were vacuum deposited by Physical Vapor Deposition (PVD). This coating technology is capable of being scaled up to sizes required in common medical imaging applications. Coatings were deposited on 4 inches X 4 inches TFT arrays for imaging performance evaluation and also on conductive-coated glass substrates for measurements of x-ray sensitivity, dark current and image lag. The TFT arrays used included pixel pitch dimensions of both 100 and 139 microns. Coating thickness between 150 microns and 250 microns were tested in the 25 kVp-100 kVp x-ray energy range utilizing exposures typical for both fluoroscopic, and radiographic imaging. X-ray sensitivities measured for the mercuric iodide samples and coated TFT detectors were superior to any published results for competitive materials (up to 7100 ke/mR/pixel for 100 micron pixels). It is believed that this higher sensitivity, can result in fluoroscopic imaging signal levels high enough to overshadow electronic noise. Image lag characteristics appear adequate for fluoroscopic rates. Resolution tests on resolution target phantoms showed that resolution is limited to the Nyquist frequency for the 139 micron pixel detectors. The ability to operate at low voltages gives adequate dark currents for most applications and allows low voltage electronics designs. Mercuric Iodide coated TFT arrays were found to be outstanding candidates for direct digital radiographic detectors for both static and dynamic (fluoroscopic) applications. Their high x-ray sensitivity, high resolution, low dark current, low voltage operation, and good lag characteristics provide a unique combination of desirable imaging performance parameters.