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Alexander Krupyshev

Brooks Automation, Inc.

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Publication

Featured researches published by Alexander Krupyshev.

Archive | 2008

Multiple dimension position sensor

Martin Hosek; Christopher Hofmeister; John F. Zettler; Alexander Krupyshev; Sergei Syssoev; Krzystof Majczak

Archive | 2011

Dual arm robot

Alexander Krupyshev; Robert T. Caveney; Martin R. Elliot; Christopher Hofmeister

Archive | 2008

Load lock fast pump vent

Christopher Hofmeister; Martin R. Elliot; Alexander Krupyshev; Joseph Hallisey; Joseph A. Kraus; William Fosnight; Craig J. Carbone; Jeffrey C. Blahnik; Ho Yin Owen Fong

Archive | 2008

Substrate processing apparatus with motors integral to chamber walls

Alexander Krupyshev; Christopher Hofmeister

Archive | 2008

SUBSTRATE TRANSPORT APPARATUS WITH MULTIPLE MOVABLE ARMS UTILIZING A MECHANICAL SWITCH MECHANISM

Christopher Hofmeister; Alexander Krupyshev; Krysztof A. Majczak; Martin Hosek; Jay Krishnasamy

Archive | 2008

COMPACT SUBSTRATE TRANSPORT SYSTEM

Christopher Hofmeister; Alexander Krupyshev; Ulysses Gilchrist

Archive | 2005

Substrate apparatus calibration and synchronization procedure

Alexander Krupyshev

Archive | 2006

Substrate alignment apparatus comprising a controller to measure alignment during transport

Alexander Krupyshev; Sergei Syssoev

Archive | 2014

Load lock chamber

Christopher Hofmeister; Martin R. Elliot; Alexander Krupyshev; Joseph Hallisey; Joseph A. Kraus; William Fosnight; Craig J. Carbone; Jeffrey C. Blahnik; Ho Yin Owen Fong

Archive | 2008

Compact substrate transport system with fast swap robot

Christopher Hofmeister; Alexander Krupyshev; Ulysses Gilchrist

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Collaboration

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Christopher Hofmeister

Brooks Automation

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Martin R. Elliot

Brooks Automation

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Craig J. Carbone

Brooks Automation

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Joseph A. Kraus

Brooks Automation

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Joseph Hallisey

Brooks Automation

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Martin Hosek

University of Connecticut

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William Fosnight

Brooks Automation

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Jeffrey C. Blahnik

Brooks Automation

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Ulysses Gilchrist

Brooks Automation

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Ho Yin Owen Fong

Brooks Automation

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