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Christopher Hofmeister

Brooks Automation, Inc.

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Publication

Featured researches published by Christopher Hofmeister.

Archive | 2006

Substrate transport apparatus

Ulysses Gilchrist; Christopher Hofmeister

Archive | 1994

Articulated arm transfer device

Christopher Hofmeister

Archive | 1996

Substrate transport apparatus with double substrate holders

Richard S. Muka; James C. Davis; Christopher Hofmeister

Archive | 1998

Substrate transport apparatus with multiple arms on a common axis of rotation

Christopher Hofmeister

Archive | 2007

Reduced capacity carrier, transport, load port, buffer system

Michael L. Bufano; Ulysses Gilchrist; William Fosnight; Christopher Hofmeister; Daniel Babbs; Robert C May

Archive | 2002

Method of transferring substrates with two different substrate holding end effectors

Christopher Hofmeister

Archive | 2000

Material transport system

Christopher Hofmeister; Glenn L. Sindledecker

Archive | 2008

Multiple dimension position sensor

Martin Hosek; Christopher Hofmeister; John F. Zettler; Alexander Krupyshev; Sergei Syssoev; Krzystof Majczak

Archive | 2006

Equipment storage for substrate processing apparatus

Daniel A. Hall; Christopher Hofmeister; William Fosnight; Jeff G. Araujo; Steven Allen; Glenn L. Sindledecker

Archive | 1996

Method for heating or cooling wafers

Ruth Ann Hendrickson; Christopher Hofmeister; Richard S. Muka

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Martin Hosek

Brooks Automation

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William Fosnight

Brooks Automation

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Ulysses Gilchrist

Brooks Automation

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Alexander Krupyshev

Brooks Automation

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Michael L. Bufano

Brooks Automation

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Robert T. Caveney

Brooks Automation

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Richard S. Muka

Brooks Automation

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Gerald M. Friedman

Brooks Automation

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Jairo Terra Moura

University of Connecticut

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Martin R. Elliot

Brooks Automation

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