Is this you? Create Your Porfile
Avatar

Alexander S. Perel

Axcelis Technologies

Network

Latest external collaboration on country level. Dive into details by clicking on the dots.

Explore More

Hotspot

Dive into the research topics where Alexander S. Perel is active.

Explore More

Publication

Featured researches published by Alexander S. Perel.

Archive | 2004

In-situ monitoring on an ion implanter

Alexander S. Perel; Lyudmila Stone; William Loizides; Victor M. Benveniste

Archive | 2001

Decaborane ion source

Thomas Neil Horsky; Alexander S. Perel; William Loizides

Archive | 2005

In-situ cleaning of beam defining apertures in an ion implanter

Philip John Ring; Alexander S. Perel

Archive | 2005

Ion beam angle measurement systems and methods for ion implantation systems

Brian S. Freer; Alexander S. Perel

Archive | 2001

Decaborane vaporizer having improved vapor flow

Alexander S. Perel; Bo H. Vanderberg

Archive | 2007

Methods and systems for trapping ion beam particles and focusing an ion beam

Peter L. Kellerman; Victor Beneveniste; Alexander S. Perel; Brian S. Freer; Michael A. Graf

Archive | 2006

Ion beam monitoring in an ion implanter using an imaging device

Alexander S. Perel; Phil J. Ring; Ronald Anthony Capodilupo; Michael A. Graf

Archive | 2000

Ionizer for an ion implanter, ion source comprising this ionizer and method of cooling an ionizer

Thomas Neil Horsky; Alexander S. Perel; William Loizides

Archive | 2004

Bellows liner for an ion beam implanter

Lyudmila Stone; Scott Barusso; Dale Stone; Alexander S. Perel

Archive | 2000

Ionizer and ion source

Thomas Neil Horsky; William Loizides; Alexander S. Perel; スチュアート ペレル アレキサンダー; キース ロイツイデス ウイリアム; ネイル ホースキー トーマス

Explore More

Collaboration

Dive into the Alexander S. Perel's collaboration.

Top Co-Authors
Avatar

William Loizides

Axcelis Technologies

View shared research outputs
Top Co-Authors
Avatar

Lyudmila Stone

Axcelis Technologies

View shared research outputs
Top Co-Authors
Avatar

Victor M. Benveniste

Axcelis Technologies

View shared research outputs
Top Co-Authors
Avatar

Michael A. Graf

Axcelis Technologies

View shared research outputs
Top Co-Authors
Avatar

Thomas Neil Horsky

Axcelis Technologies

View shared research outputs
Top Co-Authors
Avatar

Brian S. Freer

Axcelis Technologies

View shared research outputs
Top Co-Authors
Avatar

Dale Stone

Axcelis Technologies

View shared research outputs
Top Co-Authors
Avatar

Peter L. Kellerman

Axcelis Technologies

View shared research outputs
Top Co-Authors
Avatar

Victor Beneveniste

Axcelis Technologies

View shared research outputs
Top Co-Authors
Avatar

Brian Scott Freer

Eaton Corporation

View shared research outputs
Explore More
Researchain Logo
Decentralizing Knowledge