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Lyudmila Stone

Axcelis Technologies

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Publication

Featured researches published by Lyudmila Stone.

Archive | 2004

In-situ monitoring on an ion implanter

Alexander S. Perel; Lyudmila Stone; William Loizides; Victor M. Benveniste

Archive | 2006

Load lock control

Tariq Fasheh; James Carroll; Klaus Petry; Dale Stone; Lyudmila Stone; Dave Wiederspahn

Archive | 2010

COATED GRAPHITE LINERS

Julian G. Blake; Dale Keith Stone; Lyudmila Stone

Archive | 2004

Bellows liner for an ion beam implanter

Lyudmila Stone; Scott Barusso; Dale Stone; Alexander S. Perel

Archive | 2005

In-situ monitoring on a spinning-disk ion implanter

Alexander S. Perel; William Loizides; Lyudmila Stone; Victor M. Benveniste

Archive | 2016

Apparatus for improving temperature uniformity of a workpiece

Dawei Sun; D. Jeffrey Lischer; Steven M. Anella; Dale Keith Stone; Lyudmila Stone

Archive | 2011

Mandrin électrostatique à résistivité de grande surface

Richard A. Cooke; Dale Keith Stone; Lyudmila Stone; Julian G. Blake; David E. Suuronen

Archive | 2011

Mandrin électrostatique à conductivité élevée

David E. Suuronen; Lyudmila Stone; Julian G. Blake; Dale Keith Stone; Richard A. Cooke; Steven Donnell; Chandra Venkatraman

Archive | 2005

Gaine a soufflet pour implanteur a faisceau ionique

Lyudmila Stone; Scott Barrusso; Dale Stone; Alexander S. Perel

Archive | 2005

In-situ-überwachung auf einer drehscheiben-ionenimplantierungsvorrichtung

Alexander S. Perel; William Loizides; Lyudmila Stone; Victor M. Benveniste

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Collaboration

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Alexander S. Perel

Axcelis Technologies

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Dale Keith Stone

Eaton Corporation

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Victor M. Benveniste

Axcelis Technologies

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William Loizides

Axcelis Technologies

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Dale Stone

Axcelis Technologies

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Julian G. Blake

Eaton Corporation

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David E. Suuronen

Varian Semiconductor

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Richard A. Cooke

Entegris

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Chandra Venkatraman

Varian Semiconductor

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D. Jeffrey Lischer

Varian Semiconductor

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