Alexander Talalyevsky
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Publication
Featured researches published by Alexander Talalyevsky.
Journal of Vacuum Science and Technology | 2005
Li-Peng Wang; Dong S. Shim; Qing Ma; Valluri Rao; Eyal Ginsburg; Alexander Talalyevsky
Polycrystalline aluminum nitride (AlN) films, prepared by reactive sputtering, were characterized by variable-angle spectroscopic ellipsometry (VASE) and x-ray diffraction (XRD) rocking curve. A VASE model, which included cylindrical symmetry, effective-medium approximation, and surface roughness, was used to extract the optical constants of AlN films: refractive index (n) and extinction coefficient (k). Microstructure of the sputtered polycrystalline AlN films was well reflected in the VASE model and was verified by scanning electron microscopy cross-sectional micrographs. In addition, a correlation between optical constants and full width at half maximum (FWHM) of XRD rocking curve was established. Films with smaller FWHM of the XRD rocking curve, an indication of fewer defects and better crystallinity, had a higher refractive index and smaller extinction coefficient. This study leads to a faster and simpler optical method for characterizing sputtered AlN films compared to the currently predominately us...
Journal of the Acoustical Society of America | 2007
Eyal Ginsburg; Li-Peng Wang; Alexander Talalyevsky; Eyal Bar-Sadeh; Doron Rubin
Archive | 2003
Li-Peng Wang; Eyal Bar-Sadeh; Valluri Rao; John Heck; Qing Ma; Quan Tran; Alexander Talalyevsky; Eyal Ginsburg
Archive | 2003
Eyal Bar-Sadeh; Alexander Talalyevsky; Eyal Ginsburg
Archive | 2004
Eyal Ginsburg; Alexander Talalyevsky; Eyal Bar-Sadeh
Archive | 2005
Eyal Ginsburg; Alexander Talalyevsky; Eyal Bar-Sadeh
Archive | 2004
Eyal Bar-Sadeh; Alexander Talalyevsky; Eyal Ginsburg
Archive | 2004
Li-Peng Wang; Eyal Bar-Sadeh; Valluri Rao; John Heck; Qing Ma; Quan Tran; Alexander Talalyevsky; Eyal Ginsburg
Archive | 2003
Eyal Bar-Sadeh; Eyal Ginsburg; John Palo Alto Heck; Qing San Jose Ma; Valluri Saratoga Rao; Alexander Talalyevsky; Quan Fremont Tran; Li-Peng San Jose Wang
Archive | 2003
Li-Peng Wang; Eyal Bar-Sadeh; Valluri Rao; John Heck; Qing Ma; Quan Tran; Alexander Talalyevsky; Eyal Ginsburg