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Alexandre Likhanskii

Varian Semiconductor

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Publication

Featured researches published by Alexandre Likhanskii.

Archive | 2015

Ion beam uniformity control

Alexandre Likhanskii; Svetlana Radovanov; Bon-Woong Koo

Archive | 2018

Apparatus and method for improved ion beam current

Shengwu Chang; Frank Sinclair; Alexandre Likhanskii; Philip Layne

Archive | 2017

Controlling contamination particle trajectory from a beam-line electrostatic element

William Davis Lee; Alexandre Likhanskii

Archive | 2017

High Brightness Ion Beam Extraction

Bon-Woong Koo; Alexandre Likhanskii; Svetlana Radovanov; Anthony Renau

Archive | 2017

APPARATUS AND TECHNIQUES FOR TIME MODULATED EXTRACTION OF AN ION BEAM

Svetlana Radovanov; Peter F. Kurunczi; Alexandre Likhanskii

Archive | 2016

Multi-aperture extraction system for angled ion beam

Alexandre Likhanskii; Svetlana Radovanov; William Davis Lee

Archive | 2016

IN-SITU PLASMA CLEANING OF PROCESS CHAMBER COMPONENTS

Kevin Anglin; William Davis Lee; Peter F. Kurunczi; Ryan Downey; Jay T. Scheuer; Alexandre Likhanskii; William M. Holber

Archive | 2016

Apparatus and method for multilayer deposition

Alexandre Likhanskii; William Davis Lee; Svetlana Radovanov

Archive | 2016

Apparatus and method for in-situ cleaning in ion beam apparatus

Alexandre Likhanskii; Jay T. Scheuer; William Davis Lee

Archive | 2015

IN-SITU PLASMA CLEANING OF PROCESS CHAMBER ELECTROSTATIC ELEMENTS HAVING VARIED GEOMETRIES

William Davis Lee; Kevin Anglin; Peter F. Kurunczi; Ryan Downey; Jay T. Scheuer; Alexandre Likhanskii

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Svetlana Radovanov

Varian Semiconductor

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William Davis Lee

Varian Semiconductor

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Jay T. Scheuer

Varian Semiconductor

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Peter F. Kurunczi

Varian Semiconductor

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Bon-Woong Koo

Varian Semiconductor

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Kevin Anglin

Varian Semiconductor

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Ryan Downey

Varian Semiconductor

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Anthony Renau

Varian Semiconductor

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Frank Sinclair

Varian Semiconductor

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Philip Layne

Varian Semiconductor

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