Peter F. Kurunczi
Varian Semiconductor
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Publication
Featured researches published by Peter F. Kurunczi.
ION IMPLANTATION TECHNOLOGY: 16th International Conference on Ion Implantation Technology - IIT 2006 | 2006
Peter F. Kurunczi; Alexander S. Perel; Ethan Adam Wright; S. Kikuchi; Jay T. Scheuer
Supplying low energy electrons to insure neutralization of implanted wafers requires an advanced charge control system. Some devices are extremely sensitive to low levels of metal contamination. We have designed a radio frequency (rf) plasma flood gun that eliminates the use of a hot filament. This makes this PFG more reliable and not susceptible to filament failures. We will present data showing that this advanced PFG has excellent charge control with an electron energy distribution that floods the wafer with an abundant supply of low energy electrons.
Archive | 2005
Joseph C. Olson; Anthony Renau; Donna L. Smatlak; Kurt Decker-Lucke; Paul J. Murphy; Alexander S. Perel; Russell J. Low; Peter F. Kurunczi
Archive | 2012
Peter F. Kurunczi; John J. Hautala
Archive | 2006
Peter F. Kurunczi; Russell J. Low; Alexander S. Perel; Eric R. Cobb; Ethan Adam Wright
Archive | 2010
Wilhelm P. Platow; Neil J. Bassom; Peter F. Kurunczi; Alexander S. Perel; Craig R. Chaney
Archive | 2008
Rajesh Dorai; Peter F. Kurunczi; Alexander S. Perel; Wilhelm P. Platow
Archive | 2010
Peter F. Kurunczi; Victor M. Benveniste; Oliver V. Naumovski
Archive | 2013
Svetlana Radovanov; Bon-Woong Koo; Peter F. Kurunczi; Ludovic Godet
Archive | 2013
Peter F. Kurunczi; Neil J. Bassom; Wilhelm J. Platow
Archive | 2009
Wilhelm P. Platow; Neil J. Bassom; Peter F. Kurunczi; Alexander S. Perel; Craig R. Chaney
