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Alfred Schulz

Jenoptik

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Publication

Featured researches published by Alfred Schulz.

Archive | 2003

Loading and unloading station for semiconductor processing installations

Andreas Mages; Werner Scheler; Herbert Blaschitz; Alfred Schulz; Heinz Schneider

Archive | 1995

Device for coupling loading and unloading devices with semiconductor processing machines

Werner Scheler; Berndt Lahne; Andreas Mages; Uwe Michl; Eberhard Gemkow; Alfred Schulz

Archive | 1994

Einrichtung zur Kopplung von Be- und Entladegeräten mit Halbleiterbearbeitungsmaschinen

Werner Scheler; Andreas Mages; Berndt Lahne; Uwe Michl; Eberhard Gemkow; Alfred Schulz

Archive | 1996

Be- und Entladestation für Halbleiterbearbeitungsanlagen

Andreas Mages; Werner Scheler; Herbert Blaschitz; Alfred Schulz; Heinz Schneider

Archive | 1996

Loading and unloading station for semiconductor treatment installations

Andreas Mages; Werner Scheler; Herbert Blaschitz; Alfred Schulz; Heinz Schneider

Archive | 1998

Docking station for substrate transport containers

Klaus Schultz; Alfred Schulz; Marlies Mages

Archive | 1998

Transport container coupling device to a port at a loading and unloading station as used in e.g. the fabrication of integrated circuits (ICs)

Alfred Schulz; Marlies Mages; Klaus Schultz

Archive | 1998

Einrichtung zur Aufnahme von Transportbehältern an einer Be- und Entladestation

Alfred Schulz; Marlies Mages; Klaus Schultz

Archive | 1994

Device for coupling loading and unloading apparatus to semiconductor treatment machines

Werner Scheler; Berndt Lahne; Andreas Mages; Uwe Michl; Eberhard Gemkow; Alfred Schulz

Archive | 2000

Dispositif de manipulation d'objets pour le chargement et le dechargement d'une salle blanche

Andreas Mages; Andreas Birkner; Alfred Schulz; Klaus Schultz

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Collaboration

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Andreas Mages

Jenoptik

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Werner Scheler

Jenoptik

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Heinz Schneider

Jenoptik

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Herbert Blaschitz

Jenoptik

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Berndt Lahne

Carl Zeiss AG

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Klaus Schultz

Carl Zeiss AG

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Andreas Birkner

Carl Zeiss AG

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Marlies Mages

Jenoptik

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