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Berndt Lahne

Carl Zeiss AG

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Publication

Featured researches published by Berndt Lahne.

Archive | 1995

Device for coupling loading and unloading devices with semiconductor processing machines

Werner Scheler; Berndt Lahne; Andreas Mages; Uwe Michl; Eberhard Gemkow; Alfred Schulz

Archive | 1994

Device for indexing magazine compartments and wafer-shaped objects in the compartments

Andreas Birkner; Berndt Lahne; Klaus Schultz

Archive | 1996

Arrangement for handling wafer-shaped objects

Klaus Schultz; Harald Beckert; Berndt Lahne; Manfred Heinze

Archive | 1994

Einrichtung zur Kopplung von Be- und Entladegeräten mit Halbleiterbearbeitungsmaschinen

Werner Scheler; Andreas Mages; Berndt Lahne; Uwe Michl; Eberhard Gemkow; Alfred Schulz

Archive | 1994

Einrichtung zum handeln von scheibenförmigen objekten in einer handlingebene eines lokalen reinraumes

Axel Gaglin; Michael Heitmann; Berndt Lahne; Werner Scheler; Klaus Schultz

Archive | 1994

Device for handling disk-shaped objects in a handling plane of a local clean room

Berndt Lahne; Klaus Schultz; Werner Scheler; Michael Heitmann; Axel Gaglin

Archive | 1994

Device for coupling loading and unloading apparatus to semiconductor treatment machines

Werner Scheler; Berndt Lahne; Andreas Mages; Uwe Michl; Eberhard Gemkow; Alfred Schulz

Archive | 2004

Einrichtung zur Detektion von übereinander mit einem bestimmten Abstand angeordneten Substraten

Ulysses Gilchrist; Louise S. Barriss; Hagen Raue; Berndt Lahne; Manfred Heinze; Joachim König; Klaus Schultz

Archive | 2003

System for the detection of substrates arranged one above the other with a determined distance

Ulysses Gilchrist; Louise S. Barriss; Hagen Raue; Berndt Lahne; Manfred Heinze; Joachim König; Klaus Schultz

Archive | 2002

Einrichtung zur Detektion von übereinander mit einem bestimmten Abstand angeordneten Substraten Means for detecting one above the other with a certain distance disposed substrates

Louise S. Barriss; Ulysses Gilchrist; Manfred Heinze; Joachim König; Berndt Lahne; Hagen Raue; Klaus Schultz

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Klaus Schultz

Carl Zeiss AG

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Werner Scheler

Jenoptik

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Manfred Heinze

Jenoptik

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Alfred Schulz

Jenoptik

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Andreas Mages

Jenoptik

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Joachim König

Brooks Automation

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Harald Beckert

Jenoptik

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Andreas Birkner

Carl Zeiss AG

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