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Andre Gil Cardoso

Axcelis Technologies

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Publication

Featured researches published by Andre Gil Cardoso.

Archive | 1999

Zone controlled radiant heating system utilizing focused reflector

David William Kinnard; Andre Gil Cardoso

Archive | 1999

Method for detecting an endpoint for an oxygen free plasma process

Quigyan Han; Palani Sakthivel; Ricky Ruffin; Andre Gil Cardoso

Archive | 1999

Optimized optical system design for endpoint detection

Alan Janos; Andre Gil Cardoso; Daniel Richardson

Archive | 2002

Shallow-angle interference process and apparatus for determining real-time etching rate

Andre Gil Cardoso; Alan Janos

Archive | 1998

Temperature probe and measurement method for low pressure process

Joel Penelon; Andre Gil Cardoso

Archive | 2000

Contact temperature probe with thermal isolation

John William Burke; Andre Gil Cardoso; Joseph Gerard Mcginnity

Archive | 2000

METHOD OF DECIDING ENDING POINT OF OXYGEN-FREE PLASMA TREATMENT AND ASHING METHOD

Andre Gil Cardoso; Quigyan Han; Ricky Ruffin; Palani Sakthivel; ギル カルドソ アンドレ; ハン クイジャン; サクスーベル パラニー; アール． ラッフィン リッキー

Archive | 2000

Probe for contact temperature

John William Burke; Andre Gil Cardoso; Joseph Gerard Mcginnity; ギル カードーソ アンドレ; ジェラルド マクギニティー ジョセフ; ウイリアム ブルーク ジョン

Archive | 2000

Contact temperature probe with thermal isolation between probe head and heat shield of sensor wires

John William Burke; Andre Gil Cardoso; Joseph Gerard Mcginnity

Archive | 2000

Zone kontrollierte Strahlungsheizanlage mit der Verwendung von einem fokussierten Reflektor

Andre Gil Cardoso; David William Kinnard

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Collaboration

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John William Burke

Axcelis Technologies

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Joseph Gerard Mcginnity

Axcelis Technologies

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Palani Sakthivel

Eaton Corporation

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Quigyan Han

Axcelis Technologies

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Alan Janos

Axcelis Technologies

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Joel Penelon

Axcelis Technologies

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Daniel Richardson

Axcelis Technologies

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David William Kinnard

Axcelis Technologies

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Ricky Gaithersburg Ruffin

Eaton Corporation

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Ricky Ruffin

Axcelis Technologies

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