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Alan Janos

Axcelis Technologies

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Publication

Featured researches published by Alan Janos.

Archive | 2005

Apparatus and process for treating dielectric materials

Carlo Waldfried; Christopher J. Garmer; Orlando Escorcia; Ivan Berry; Palani Sakthivel; Alan Janos

Archive | 2004

Electrodeless lamp for emitting ultraviolet and/or vacuum ultraviolet radiation

Alan Janos; Malcolm Pack; Mohammad Kamarchi; Michael Colson

Archive | 2003

Dielectric barrier discharge apparatus and process for treating a substrate

Ivan Berry; Alan Janos; Michael Colson

Archive | 2001

Tunable radiation source providing a VUV wavelength planar illumination pattern for processing semiconductor wafers

Alan Janos; Daniel Richardson

Archive | 2001

Plasma process and apparatus

Alan Janos; David Ferris; Ivan Berry; Michael G. Ury

Archive | 2005

In-situ absolute measurement process and apparatus for film thickness, film removal rate, and removal endpoint prediction

Alan Janos; Montien Saubhayana

Archive | 1999

Optimized optical system design for endpoint detection

Alan Janos; Andre Gil Cardoso; Daniel Richardson

Archive | 2002

Shallow-angle interference process and apparatus for determining real-time etching rate

Andre Gil Cardoso; Alan Janos

Archive | 1997

Double window exhaust arrangement for wafer plasma processor

Alan Janos

Archive | 2003

Process for optically erasing charge buildup during fabrication of an integrated circuit

Alan Janos; Anthony Sinnot; Ivan Berry; Kevin Stewart; Robert Douglas Mohondro

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Ivan Berry

Axcelis Technologies

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Daniel Richardson

Axcelis Technologies

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Michael Colson

Axcelis Technologies

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Andre Gil Cardoso

Axcelis Technologies

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Kevin Stewart

Axcelis Technologies

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Malcolm Pack

Axcelis Technologies

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Betty Zhang

Axcelis Technologies

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Anthony Sinnot

Axcelis Technologies

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Carlo Waldfried

Axcelis Technologies

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Christopher J. Garmer

Axcelis Technologies

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