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Dive into the research topics where Andreas Geiss is active.

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Featured researches published by Andreas Geiss.


Archive | 2006

Sputter apparatus with a pipe cathode and method for operating this sputter apparatus

Jürgen Henrich; Andreas Sauer; Andreas Geiss; Felix Brinckmann


Archive | 2006

VERTICALLY MOUNTED ROTARY CATHODES IN SPUTTERING SYSTEM ON ELEVATED RAILS

Samuel Leung; Andreas Geiss; Toshio Kiyotake; Erkan Koparal; Jose Albor; William A. Bagley


Archive | 2006

MACHINE FOR COATING A SUBSTRATE, AND MODULE

Hans Buchberger; Andreas Geiss; Jörg Dr. Krempel-Hesse; Dieter Haas


Archive | 2005

Device for coating a substrate and module

Hans Buchberger; Andreas Geiss; Jörg Dr. Krempel-Hesse; Dieter Haas


Archive | 2009

MECHANICAL MODULARITY CHAMBERS

Michael Schaefer; Andreas Geiss


Archive | 2011

Substrate transport system and method

Michael Schaefer; Tobias Bergmann; Josef Hoffmann; Andreas Sauer; Juergen Henrich; Andreas Geiss


Archive | 2013

Vakuumdurchführung und Vakuumbeschichtungsvorrichtung mit Vakuumdurchführungen

Andreas Geiss; Tobias Bergmann


Archive | 2011

Vakuumbeschichtungsvorrichtung The vacuum deposition apparatus

Frank Fuchs; Michael Neumayer; Guido Mahnke; Harald Rost; Michael Klosch-Trageser; Tobias Bergmann; Andreas Geiss


Archive | 2005

Sputter device with a tubular cathode and process of operating the sputter device

Jürgen Henrich; Andreas Sauer; Andreas Geiss; Felix Brinckmann


Archive | 2005

Zerstäubungsvorrichtung mit einer Rohrkathode und Verfahren zum Betreiben dieser Zerstäubungsvorrichtung Sputtering with a tube cathode and method of operating this sputtering apparatus

Juergen Henrich; Andreas Sauer; Andreas Geiss; Felix Brinckmann

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