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Erkan Koparal

Applied Materials

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Publication

Featured researches published by Erkan Koparal.

Archive | 2009

COATING SYSTEM AND METHOD FOR COATING A SUBSTRATE

Erkan Koparal

Archive | 2009

PROCESSING SYSTEM AND METHOD OF OPERATING A PROCESSING SYSTEM

Ralph Lindenberg; Erkan Koparal; Thomas Berger

Archive | 2011

System for utilization improvement of process chambers and method of operating thereof

Erkan Koparal

Archive | 2006

Machine for treating substrates and method

Erkan Koparal; Dieter Haas

Archive | 2006

VERTICALLY MOUNTED ROTARY CATHODES IN SPUTTERING SYSTEM ON ELEVATED RAILS

Samuel Leung; Andreas Geiss; Toshio Kiyotake; Erkan Koparal; Jose Albor; William A. Bagley

Archive | 2012

Method and system for maintaining an edge exclusion shield

Ralph Lindenberg; Erkan Koparal

Archive | 2006

Arrangement and method for the treatment of substrates

Erkan Koparal; Dieter Haas

Archive | 2007

Anlage zur Behandlung von Substraten und Verfahren

Erkan Koparal; Dieter Haas

Archive | 2012

Système de traitement de substrat et procédé de traitement de substrats

Oliver Graw; Erkan Koparal

Archive | 2012

COATING APPARATUS AND METHOD

Erkan Koparal; Andreas Kloeppel

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Dieter Haas

Applied Materials

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Oliver Graw

Applied Materials

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Ralph Lindenberg

Applied Materials

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Andreas Geiss

Applied Materials

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Andreas Kloeppel

Applied Materials

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Jose Albor

Applied Materials

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Samuel Leung

Applied Materials

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Thomas Berger

Applied Materials

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Toshio Kiyotake

Applied Materials

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William A. Bagley

Applied Materials

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