Andrew Carswell
Micron Technology
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Publication
Featured researches published by Andrew Carswell.
workshop on microelectronics and electron devices | 2010
guohua Wei; Sony Varghese; Kevin L. Beaman; Irina Vasilyeva; Tom Mendiola; Andrew Carswell; David Fillmore; Shifeng Lu
This paper studies the nanomechanical properties, including hardness and Youngs modulus (both in a dry condition and in deionized water), fracture toughness, cohesive strength and scratch resistance of eight commonly used SiO2-based dielectric films, Boron Phosphosilicate Glass (BPSG), BPSG with Rapid Thermal Processing (RTP), Phosphosilicate Glass (PSG), Spin-On Dielectric (SOD), Plasma Enhanced Chemical Vapor Deposition (PECVD) Tetraethyl Orthosilicate (TEOS), high aspect ratio oxide (O3-TEOS), High Density Plasma Oxide (HDP), and Silane Oxide. Significant differences were found among these films. The effects of the nanomechanical properties on dielectric film reliability and CMP process are discussed.
Archive | 2009
Andrew Carswell
Archive | 2008
Theodore M. Taylor; Andrew Carswell
Archive | 2006
Zhenyu Lu; Naga Chandrasekaran; Andrew Carswell
Archive | 2015
Andrew Carswell
Archive | 2012
Andrew Carswell; Wayne Hai-Wei Huang; Siddartha Kondoju; Jin Lu; Suresh Ramakrishnan; Kozaburo Sakai; Sony Varghese; Andrey V. Zagrebelny
Archive | 2012
Sony Varghese; Andrew Carswell; Kozaburo Sakai; Andrey V. Zagrebelny; Wayne Huang; Jin Lu; Suresh Ramakrishnan
Archive | 2005
Rodney C. Kistler; Andrew Carswell
Archive | 2016
Andrew Carswell; Tony M. Lindenberg; Mark Morley; Kyle Ritter; Lequn Liu
Archive | 2013
Andrey V. Zagrebelny; Chet Carter; Andrew Carswell
