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Andrey V. Korolev

Air Liquide

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Publication

Featured researches published by Andrey V. Korolev.

advanced semiconductor manufacturing conference | 2011

Scaling of copper seed layer thickness using plasma-enhanced ALD and an optimized precursor

Jiajun Mao; Eric Eisenbraun; Vincent M. Omarjee; Andrey V. Korolev; Christian Dussarrat

A recently developed precursor, AbaCus, has been evaluated for use in ultra-low temperature copper deposition by PEALD. Film adhesion, platability and process window evaluation demonstrate a strong capability of this precursor to overcome current metallization challenges.

Archive | 2013

LIQUID PHASE SYNTHESIS OF TRISILYLAMINE

Andrey V. Korolev

Meeting Abstracts | 2010

Ultra-Low Temperature Deposition of Copper Seed Layers by PEALD

Jiajun Mao; Eric Eisenbraun; Vincent M. Omarjee; Andrey V. Korolev; Clement Lansalot; Christian Dussarrat

Archive | 2012

Heteroleptic pyrrolecarbaldimine precursors

Andrey V. Korolev; Clement Lansalot-Matras

Archive | 2010

BIS-KETOIMINATE COPPER PRECURSORS FOR DEPOSITION OF COPPER-CONTAINING FILMS

Christian Dussarrat; Clement Lansalot-Matras; Vincent M. Omarjee; Andrey V. Korolev

Archive | 2012

Heteroleptic (allyl)(pyrroles-2-aldiminate) metal-containing precursors, their synthesis and vapor deposition thereof to deposit metal-containing films

Clement Lansalot-Matras; Andrey V. Korolev

Archive | 2013

Synthesis methods for carbosilanes

Zhiwen Wan; Ziyun Wang; Ashulosh Misra; Jean-Marc Girard; Claudia Fafard; Andrey V. Korolev

Meeting Abstracts | 2011

Copper-ALD Seed Layer as an Enabler for Device Scaling

Jiajun Mao; Eric Eisenbraun; Vincent M. Omarjee; Andrey V. Korolev; Christian Dussarrat

219th ECS Meeting | 2011

Room Temperature Copper Seed Layer Deposition by Plasma-Enhanced Atomic Layer Deposition

Jiajun Mao; Eric Eisenbraun; Vincent M. Omarjee; Andrey V. Korolev; Christian Dussarrat

Archive | 2012

Synthesis method for copper compounds

Andrey V. Korolev; Venkateswara R. Pallem

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Christian Dussarrat

Air Liquide

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Vincent M. Omarjee

Air Liquide

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Clement Lansalot-Matras

Air Liquide

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Eric Eisenbraun

State University of New York System

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Jiajun Mao

State University of New York System

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Ashulosh Misra

Air Liquide

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Claudia Fafard

Air Liquide

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Clement Lansalot

Air Liquide

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Jean-Marc Girard

Air Liquide

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Venkateswara R. Pallem

Air Liquide

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