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Andy Cowley

Infineon Technologies

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Publication

Featured researches published by Andy Cowley.

Archive | 2003

Dual damascene structure and method

Kaushik A. Kumar; Douglas C. La Tulipe; Timothy J. Dalton; Larry Clevenger; Andy Cowley; Erdem Kaltalioglu; Jochen Schacht

Archive | 2003

Reduction of the shear stress in copper via's in organic interlayer dielectric material

Andy Cowley; Erdem Kaltalioglu; Mark Hoinkis; Michael Stetter

Archive | 2001

Zero mask MIMcap process for a low k BEOL

Michael Stetter; Petra Felsner; Andreas K. Augustin; Gabriela Brase; Andy Cowley; Gerald Friese

Archive | 2003

ROBUST VIA STRUCTURE AND METHOD

Andy Cowley; Michael Stetter; Erdem Kaltalioglu

Archive | 2001

Dual hardmask single damascene integration scheme in an organic low k ILD

Andy Cowley; Erdem Kaltalioglu; Michael Stetter

Archive | 2001

PLASMA RIE POLYMER REMOVAL

Andy Cowley; Peter Emmi; Timothy Dalton; Christopher Jahnes

Archive | 2004

Composite intermetal dielectric structure including low-k dielectric material

Sun-OO Kim; Markus Naujok; Andy Cowley

Archive | 2003

Composite low-k dielectric structure

Sun-OO Kim; Markus Naujok; Andy Cowley

Archive | 2003

Via density rules

Mark Hoinkis; Matthias Hierlemann; Mohammed Fazil Fayaz; Andy Cowley; Erdum Kaltalioglu

Archive | 2001

DUAL DAMASCENE PROCESS UTILIZING A LOW-K DUAL DIELECTRIC

Michael Stetter; Erdem Kaltalioglu; Andy Cowley

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Collaboration

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Erdem Kaltalioglu

IBM

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Larry Clevenger

IBM

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Markus Naujok

Infineon Technologies

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Sun-OO Kim

Infineon Technologies

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Andrew H. Simon

IBM

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Chih-Chao Yang

IBM

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Erdem Kaltalioglu

IBM

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Michael Stetter

University College West

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Jochen Schacht

IBM

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Mark Hoinkis

IBM

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