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Ankur Kadam

Applied Materials

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Publication

Featured researches published by Ankur Kadam.

Archive | 2014

GENERATION OF COMPACT ALUMINA PASSIVATION LAYERS ON ALUMINUM PLASMA EQUIPMENT COMPONENTS

Sung Je Kim; Laksheswar Kalita; Yogita Pareek; Ankur Kadam; Prerna Goradia; Bipin Thakur; Dmitry Lubomirsky

Archive | 2007

Reactive sputtering zinc oxide transparent conductive oxides onto large area substrates

Yan Ye; Ankur Kadam; Yanping Li; Allen Lau; Makoto Inagawa; Bradley O. Stimson; Akihiro Hosokawa

Archive | 2006

Reactive sputter deposition of a transparent conductive film

Yanping Li; Yan Ye; Yong-Kee Chae; Tae Kyung Won; Ankur Kadam; Shuran Sheng; Liwei Li

Archive | 2008

Apparatuses and methods of substrate temperature control during thin film solar manufacturing

Soo Young Choi; Ankur Kadam; Yong Kee Chae

Applied Surface Science | 2015

Preparation of spherical ceria coated silica nanoparticle abrasives for CMP application

Lekha Peedikakkandy; Laksheswar Kalita; Pravin Kavle; Ankur Kadam; Vikas Gujar; Mahesh Arcot; Parag Bhargava

Archive | 2017

METHOD FOR ELECTROCHEMICALLY GROWN YTTRIA OR YTTRIUM OXIDE ON SEMICONDUCTOR PROCESSING EQUIPMENT

Laksheswar Kalita; Prerna A. Goradia; Geetika Bajaj; Yogita Pareek; Yixing Lin; Dmitry Lubomirsky; Ankur Kadam; Bipin Thakur; Kevin A. Papke; Kaushik Vaidya

Archive | 2016

Barrier anodization methods to develop aluminum oxide layer for plasma equipment components

Laksheswar Kalita; Yogita Pareek; Ankur Kadam; Bipin Thakur; Dmitry Lubomirsky

Archive | 2015

Génération de couches de passivation en oxyde d'aluminium compactes sur des composants d'équipement à plasma en aluminium

Sung Je Kim; Laksheswar Kalita; Yogita Pareek; Ankur Kadam; Prerna Goradia; Bipin Thakur; Dmitry Lubomirsky

Archive | 2008

Appareils et procédés de régulation de température de substrat pendant la fabrication solaire de film mince

Soo Young Choi; Ankur Kadam; Yong Kee Chae

Archive | 2008

Vorrichtungen und verfahren zur substrattemperaturregelung während der dünnfilm-solarherstellung

Yong Kee Chae; Soo Young Choi; Ankur Kadam

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Collaboration

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Laksheswar Kalita

Applied Materials

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Bipin Thakur

Applied Materials

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Dmitry Lubomirsky

Applied Materials

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Yogita Pareek

Applied Materials

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Soo Young Choi

Applied Materials

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Yan Ye

Applied Materials

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Yanping Li

Applied Materials

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Yong Kee Chae

Applied Materials

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Akihiro Hosokawa

Applied Materials

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Allen Lau

Applied Materials

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