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Dive into the research topics where Allen Lau is active.

Publication


Featured researches published by Allen Lau.


Archive | 2002

Pedestal with integral shield

Karl M. Brown; Vineet Mehta; See-Eng Phan; Semyon Sherstinsky; Allen Lau


Archive | 2005

Detachable electrostatic chuck for supporting a substrate in a process chamber

Karl M. Brown; Semyon Sherstinsky; Wei W. Wang; Cheng-Hsiung Tsai; Vineet Mehta; Allen Lau; Steve Sansoni


Archive | 2006

Ring assembly for substrate processing chamber

Jennifer Watia Tiller; Allen Lau; Marc O. Schweitzer; Steven V. Sansoni; Keith A. Miller; Christopher Boitnott


Archive | 2004

Detachable electrostatic chuck

Karl M. Brown; Nora Arellano; Semyon Sherstinsky; Allen Lau; Cheng-Hsiung Tsai; Vineet Mehta; Steve Sansoni; Wei W. Wang


Archive | 2003

Lower pedestal shield

Karl M. Brown; Vineet Mehta; See-Eng Phan; Semyon Sherstinsky; Allen Lau


Archive | 2007

Reactive sputtering zinc oxide transparent conductive oxides onto large area substrates

Yan Ye; Ankur Kadam; Yanping Li; Allen Lau; Makoto Inagawa; Bradley O. Stimson; Akihiro Hosokawa


Archive | 2006

Coil and coil support for generating a plasma

Ian A. Pancham; Michael Rosenstein; Leif Eric Delaurentis; Allen Lau; Praburam Gopalraja; James Van Gogh


Archive | 2002

Shutter disk and blade alignment sensor

Michael Feltsman; Allen Lau; Michael Rosenstein; Marc O. Schweitzer


Archive | 2005

Build-in loto device on equipment breaker panel

Allen Lau; Michael Rosenstein; Carl Johnson; Sharon Niehoff


Archive | 2003

Method for detecting the position of a shutter disk in a physical vapor deposition chamber

Michael Feltsman; Allen Lau; Michael Rosenstein; Marc O. Schweitzer

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