Ashwin A. Seshia

A vacuum packaged surface micromachined resonant accelerometer

This paper describes the operation of a vacuum packaged resonant accelerometer subjected to static and dynamic acceleration testing. The device response is in broad agreement with a new analytical model of its behavior under an applied time-varying acceleration. Measurements include tests of the scale factor of the sensor and the dependence of the output sideband power and the noise floor of the double-ended tuning fork oscillators as a function of the applied acceleration frequency. The resolution of resonant accelerometers is shown to degrade 20 dB/decade beyond a certain characteristic acceleration corner frequency. A prototype device was fabricated at Sandia National Laboratories and exhibits a noise floor of 40 /spl mu/g//spl radic/(Hz) for an input acceleration frequency of 300 Hz.

Dynamics and control of micromachined gyroscopes

We summarize principles of operation of micromachined gyroscopes, analyze dynamics of ideal and non-ideal systems, and propose an approach for formulation and solving problems of control. The suggested approach uses active nonlinear feedback control for drive and compensation of errors. Both non-adaptive and adaptive strategies are presented. These strategies can be used for a broad class of micromachined vibratory gyroscopes including those for angle and angular rate measurement.

An integrated microelectromechanical resonant output gyroscope

We describe the principle of operation and experimental characterization of an integrated micromechanical vibratory rate gyroscope based on resonant sensing of the Coriolis force. The new design has several advantages over rate gyroscopes that utilize open-loop displacement sensing for rotation rate measurement. Some of these advantages include simpler dynamics and control, improved scale factor stability, large dynamic range, high resolution, and a quasi-digital FM output. A z-axis integrated surface-micromachined gyroscope fabricated at the Sandia National Laboratories has a measured noise floor of 0.3 deg/sec//spl radic/(Hz).

A bulk acoustic mode single-crystal silicon microresonator with a high-quality factor

This paper details a bulk acoustic mode resonator fabricated in single-crystal silicon with a quality factor of 15 000 in air, and over a million below 10 mTorr at a resonant frequency of 2.18 MHz. The resonator is a square plate that is excited in the square-extensional mode and has been fabricated in a commercial foundry silicon-on-insulator (SOI) MEMS process through MEMSCAP. This paper also presents a simple method of extracting resonator parameters from raw measurements heavily buried in electrical feedthrough. Its accuracy has been demonstrated through a comparison between extracted motional resistance values measured at different voltage biases and those predicted from an analytical model. Finally, a method of substantially cancelling electrical feedthrough through system-level electronic implementation is also introduced.

Enhancing Parametric Sensitivity in Electrically Coupled MEMS Resonators

In an array of identical resonators coupled through weak springs, a small perturbation in the structural properties of one of the resonators strongly impacts coupled oscillations causing the vibration modes to localize. Theoretical studies show that measuring the variation in eigenstates due to such vibration-mode localization can yield orders of magnitude enhancement in signal sensitivity over the technique of simply measuring induced resonant-frequency shifts. In this paper, we propose the application of mode localization for detecting small perturbations in stiffness in pairs of nearly identical weakly coupled microelectromechanical-system resonators and also examine the effect of initial mechanical asymmetry caused by fabrication tolerances in such sensors. For the first time, the variation in eigenstates is studied by coupling the resonators using electrostatic means that allow for significantly weaker coupling-spring constants and the possibility for stronger localization of vibration modes. Eigenstate variations that are nearly three orders of magnitude greater than the corresponding shifts in the resonant frequency for an induced perturbation in stiffness are experimentally demonstrated. Such high electrically tunable parametric sensitivities, together with the added advantage of intrinsic common-mode rejection, pave the way to a new paradigm of mechanical sensing.

Study of lateral mode SOI-MEMS resonators for reduced anchor loss

MEMS resonators fabricated in silicon-on-insulator (SOI) technology must be clamped to the substrate via anchoring stems connected either from within the resonator or through the sides, with the side-clamped solution often employed due to manufacturing constraints. This paper examines the effect of two types of commonly used side-clamped, anchoring-stem geometries on the quality factor of three different laterally-driven resonator topologies. This study employs an analytical framework which considers the relative distribution of strain energies between the resonating body and clamping stems. The ratios of the strain energies are computed using ANSYS FEA and used to provide an indicator of the expected anchor-limited quality factors. Three MEMS resonator topologies have been fabricated and characterized in moderate vacuum. The associated measured quality factors are compared against the computed strain energy ratios, and the trends are shown to agree well with the experimental data.

Low loss HF band SOI wine glass bulk mode capacitive square-plate resonator

This paper reports on the design and electrical characterization of a single crystal silicon micromechanical square-plate resonator. The microresonator has been excited in the anti-symmetrical wine glass mode at a resonant frequency of 5.166 MHz and exhibits an impressive quality factor (Q) of 3.7 × 106 at a pressure of 33 mtorr. The device has been fabricated in a commercial foundry process. An associated motional resistance of approximately 50 kΩ using a dc bias voltage of 60 V is measured for a transduction gap of 2 µm due to the ultra-high Q of the resonator. This result corresponds to a frequency-Q product of 1.9 × 1013, the highest reported for a fundamental mode single-crystal silicon resonator and on par with some of the best quartz crystal resonators. The results are indicative of the superior performance of silicon as a mechanical material, and show that the wine glass resonant mode is beneficial for achieving high quality factors allowed by the material limit.

Ultrasensitive mass balance based on a bulk acoustic mode single-crystal silicon resonator

A single-crystal silicon resonant bulk acoustic mass sensor with a measured resolution of 125pg∕cm2 is presented. The mass sensor comprises a micromachined silicon plate that is excited in the square-extensional bulk acoustic resonant mode at a frequency of 2.182MHz, with a quality factor exceeding 106. The mass sensor has a measured mass to frequency shift sensitivity of 132Hzcm2∕μg. The resonator element is embedded in a feedback loop of an electronic amplifier to implement an oscillator with a short term frequency stability of better than 7ppb at an operating pressure of 3.8mTorr.

A Single-Crystal-Silicon Bulk-Acoustic-Mode Microresonator Oscillator

A timing reference incorporating a single-crystal-silicon micromechanical resonator with a quality factor of larger than one million and a resonant frequency of 2.18 MHz is demonstrated. The resonator is excited in the square extensional bulk acoustic mode at 4 mtorr, and it has been fabricated in a foundry SOI MEMS process. The silicon microresonator is adapted as a timing element for a precision oscillator with a measured short-term Allan deviation of 0.6 ppb.

Highly specific label-free protein detection from lysed cells using internally referenced microcantilever sensors

We report the investigation of label-free protein detection directly from lysed cells using microcantilever sensors. The integration of an internally referenced microcantilever sensor combined with peptide aptamer technology enables scalable and label-free detection of proteins from a complex biological environment (e.g. cell lysate). The internally referenced microcantilever sensor was found to be effective in minimizing both the effects of thermal drift and non-specific binding interactions with the backside of the cantilever, thereby allowing protein detection in a complex biological background. Highly specific peptide aptamers are used to modify the cantilever surface to specifically detect less than 80 nM CDK2 protein from yeast cell lysate. This binding of CDK2 on the microcantilever generates a tensile surface stress of average magnitude equal to 70+/-22 mN/m. Similar experiments conducted with quartz crystal microbalance (QCM) technology are consistent with the response observed using microcantilever sensors.